SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7448, Issue , 2009, Pages

The NSLS-II multilayer laue lens deposition system

(7) Conley, Ray a Boueta, Nathalie a Biancarosaa, James a Shena, Qun a Boasb, Larry b Feracab, John b Rosenbaum, Leonard b

a BROOKHAVEN NATIONAL LABORATORY (United States)

b CVD Equipment Corporation (United States)

Author keywords

Deposition; Laue lens; Multilayer; Optics; Sputter; Thin film; X ray

Indexed keywords

DEPOSITION SYSTEMS; GRADED MULTILAYERS; LAUE LENS; MAGNETRON SOURCES; MULTI-LAYER-COATING; MULTILAYER LAUE LENS; NANO-FOCUSING; POSITIVE FEATURES; SPUTTER;

DEPOSITION; FILM GROWTH; FILM PREPARATION; LENSES; MACHINE DESIGN; OPTICAL INSTRUMENTS; THIN FILM DEVICES;

MULTILAYERS;

EID: 70449494110 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.842076 Document Type: Conference Paper

Times cited : (15)

References (8)

1
- 44849085695
- "NSLS-II Conceptual Design Report", http://www.bnl.gov/nsls2/ project/CDR/.
- NSLS-II Conceptual Design Report

2
- 44649093857
- Wedged multilayer laue lens
- R. Conley, C. Liu, J. Qian, C.M. Kewish, A.T. Macrander, H. Yan, H. C. Kang, J. Maser, G. B. Stephenson, "Wedged multilayer Laue lens", Rev. Sci. Instrum. 79, 053104 (2008).
- (2008) Rev. Sci. Instrum. , vol.79 , pp. 053104
- Conley, R.¹ Liu, C.² Qian, J.³ Kewish, C.M.⁴ Macrander, A.T.⁵ Yan, H.⁶ Kang, H.C.⁷ Maser, J.⁸ Stephenson, G.B.⁹

3
- 15844404713
- Multilayer laue lenses as high-resolution X-ray optics
- in Design and Microfabrication of Novel X-Ray Optics II, edited by A. Snigirev, D. Mancini, SPIE, Bellingham, WA
- J. Maser, G.B. Stephenson, S. Vogt, W. Yun, A.T. Macrander, H.C. Kang, C. Liu, and R. Conley, "Multilayer Laue lenses as high-resolution X-ray optics, " in Design and Microfabrication of Novel X-Ray Optics II, edited by A. Snigirev, D. Mancini, Proc. SPIE 5539, 185-194, SPIE, Bellingham, WA, (2004).
- (2004) Proc. SPIE , vol.5539 , pp. 185-194
- Maser, J.¹ Stephenson, G.B.² Vogt, S.³ Yun, W.⁴ Macrander, A.T.⁵ Kang, H.C.⁶ Liu, C.⁷ Conley, R.⁸

4
- 33645279539
- Nanometer linear focusing of hard X-rays by a multilayer laue lens
- H.C. Kang, J. Maser, G.B. Stephenson, C. Liu, R. Conley, A.T. Macrander, S. Vogt, "Nanometer linear focusing of hard X-rays by a multilayer Laue lens, " Phys. Rev. Lett. 96, 127401, (2006).
- (2006) Phys. Rev. Lett. , vol.96 , pp. 127401
- Kang, H.C.¹ Maser, J.² Stephenson, G.B.³ Liu, C.⁴ Conley, R.⁵ Macrander, A.T.⁶ Vogt, S.⁷

5
- 42149180717
- Multilayer growth in the APS rotary deposition system
- R. Conley, C. Liu, A.T. Macrander, C. Morawe, "Multilayer growth in the APS rotary deposition system", Proceedings of SPIE 6705, 670505 (2007).
- (2007) Proceedings of SPIE , vol.6705 , pp. 670505
- Conley, R.¹ Liu, C.² Macrander, A.T.³ Morawe, C.⁴

6
- 70449461100
- Dexter, MA. website
- KSA-MOS device, K-Space Associates, Dexter, MA., website www.k-space.com.
- KSA-MOS Device

7
- 85012249443
- From flat substrate to elliptical KB mirror by profile coating
- in Synchrotron Radiation Instrumentation
- C. Liu, R. Conley, L. Assoufid, Z. Cai, J. Qian, A. T. Macrander, "From flat substrate to elliptical KB mirror by profile coating, " in Synchrotron Radiation Instrumentation, Conf. Proc. AIP 705, 704-707 (2003).
- (2003) Conf. Proc. AIP , vol.705 , pp. 704-707
- Liu, C.¹ Conley, R.² Assoufid, L.³ Cai, Z.⁴ Qian, J.⁵ Macrander, A.T.⁶

8
- 70449478639
- Inc. San Diego, CA. website www.msi-pse.com
- Sun-Source magnetrons, Materials Science, Inc., San Diego, CA., website www.msi-pse.com.
- Sun-Source Magnetrons

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.