Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 89-92

  Jahedi, N ^a   Conley, R ^a,b   Shi, B ^a   Qian, J ^a   Lauer, K ^b   Macrander, A ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Focusing; Lens; Metrology; Multilayer; SEM; X ray

Indexed keywords

FOCUSING LENS; FRESNEL ZONES; IMAGE PROCESSING AND ANALYSIS; MULTILAYER LAUE LENS; MULTILAYER STRUCTURES; SCANNING ELECTRON MICROSCOPE; SEM;

ELECTRON MICROSCOPES; IMAGE ANALYSIS; LENSES; MULTILAYERS; OPTICAL INSTRUMENTS; SCANNING ELECTRON MICROSCOPY;

MULTILAYER FILMS;

EID: 77950815721     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.11.015     Document Type: Article

References (25)

1. Yumoto H., Mimura H., Matsuyama S., Hara H., Yamamura K., Sano Y., Ueno K., Endo K., Mori Y., Yabashi M., Nishino Y., Tamasaku K., Ishikawa T., and Yamauchi K. Rev. Sci. Instrum. 76 (2005) 063708
2. Hignette O., Cloetens P., Rostaing G., Bernard P., and Morawe C. Rev. Sci. Instrum. 76 (2005) 063709
3. Liu W., Ice G.E., Tischler J.Z., Khounsary A., Liu C., Assoufid L., and Macrander A.T. Rev. Sci. Instrum. 76 (2005) 113701
4. Kimura T., Handa S., Mimura H., Yumoto H., Yamakawa D., Matsuyama S., Inagaki K., Sano Y., Tamasaku K., Nishino Y., Yabashi M., Ishikawa T., and Yamauchi Y. Jpn. J. Appl. Phys. 48 (2009) 072503
5. Snigirev A., Kohn V., and Snigireva I. Nature 384 (1996) 49
6. Schroer C.G., and Lengeler B. Phys. Rev. Lett. 94 (2005) 054802
7. Chao W., Harteneck B.D., Liddle J.A., Anderson E.H., and Attwood D.T. Nature 435 (2005) 1210
8. Yin G.-C., Song Y.-F., Tang M.-T., Chen F.-R., Liang K.S., Duewer F.W., Feser M., Yun W., and Shieh H.-P.D. Appl. Phys. Lett. 89 (2006) 221122
9. Maser J., and Schmahl G. Opt. Commun. 89 (1992) 355
10. Kang H.C., Maser J., Stephenson G.B., Liu C., Conley R., Macrander A.T., and Vogt S. Phys. Rev. Lett. 96 (2006) 127401
11. Kang H.-C., Yan H., Winarski R.P., Holt M.V., Maser J., Liu C., Conley R., Vogt S., Macrander A.T., and Stephenson G.B. Appl. Phys. Lett. 92 (2008) 221114
12. A. Macrander, H. Yan, H.C. Kang, J. Maser, C. Liu, R. Conley, G.B. Stephenson, Nanofocusing of Hard X-rays with Multilayer Laue Lenses, Handbook of Optics, 3rd Edition, Optical Society of America, Volume V, Chapter 42.
13. Yan H., Maser J., Macrander A., Shen Q., Vogt S., Stephenson G.B., and Kang H.C. Phys Rev. B 76 (2007) 115438
14. Schroer C.G. Phys. Rev. B 74 (2006) 033405
15. Pfeiffer F., David C., van der Veen J.F., and Bergemann C. Phys. Rev. B 73 (2006) 245331
16. S. Dierker, et al., NSLS II Conceptual Design Report, Brookhaven National Laboratory. 〈http://www.bnl.gov/nsls2/project/CDR〉 (2006).
17. Liu C., Conley R., Macrander A.T., Maser J., Kang H.C., Zurbuchen M.A., and Stephenson G.B. J. Appl. Phys. 98 (2005) 113519
18. Liu C., Conley R., Macrander A.T., Maser J., Kang H.C., and Stephenson G.B. Thin Solid Films 515 (2006) 654
19. Kang H.C., Stephenson G.B., Liu C., Conley R., Khachatryan R., Wieczorek M., Macrander A.T., Yan H., Maser J., Hiller J., and Koritala R. Rev. Sci. Instrum. 8 (2007) 046103
20. Kirz J. J. Opt.Soc. Am. 64 (1974) 301
21. Liu C., Conley R., Qian J., Kewish C.M., Macrander A.T., Maser J., Kang H.C., Yan H., and Stephenson G.B. Nucl. Instr. and Meth. A 582 (2007) 123
22. R. Conley, C. Liu, A. T. Macrander, H. Yan, H.-C. Kang, J. Maser, G.B. Stephenson, US. Patent Application.
23. C. Liu, B. Shi, J. Qian, H. Yan, M. wieczorek, A.T. Macrander, J. Maser, G.B. Stephenson, Synchrotron Instrumentation Conference 2009, Melbourne, Australia, AIP Conference Proceedings, in press
24. Conley R., Liu C., Qian J., Kewish C., Macrander A.T., Yan H., Kang H.C., Maser J., and Stephenson G.B. Rev. Sci. Instrum. 79 (2008) 053104
25. Yan H., Kang H.C., Maser J., Macrander A.T., Kewish C.M., Liu C., Conley R., and Stephenson G.B. Nucl. Instr. and Meth. A 582 (2007) 126