Development of a flexible robotic system for multiscale applications of micro/nanoscale manipulation and assembly

IEEE/ASME Transactions on Mechatronics

Volumn 16, Issue 2, 2011, Pages 266-276

  Xie, Hui ^a   Régnier, Stéphane ^a  

^a UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

Author keywords

Atomic force microscope (AFM); flexible system; micro and nanomanipulation; robot

Indexed keywords

AMBIENT CONDITIONS; ATOMIC FORCE MICROSCOPES; FLEXIBLE ROBOTICS; FLEXIBLE SYSTEM; FUNCTIONALIZED; HIGH EFFICIENCY; MICRO-SCALES; MULTISCALE APPLICATIONS; MULTISCALES; NANO SCALE; NANOMANIPULATIONS; PICK-AND-PLACE; ROBOTIC SYSTEMS; SILICON NANOWIRES;

ATOMIC FORCE MICROSCOPY; MICROMANIPULATORS; NANOSTRUCTURED MATERIALS; NANOWIRES; ROBOTICS; ROBOTS;

ROBOTIC ASSEMBLY;

EID: 78951484786     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2010.2040483     Document Type: Article

References (34)

1. Y. Rollot, S. Ŕegnier, and J. C. Guinot, "Simulation of micromanipulations: Adhesion forces and specific dynamic models," Int. J. Adhes. Adhes., vol. 19, no. 1, pp. 35-48, 1999.
2. A. Menciassi,A. Eisinberg, I. Izzo, and P. Dario, "From 'macro' to 'micro' manipulation: Models and experiments," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 311-320, Jun. 2004.
3. L. X. Dong and B. J. Nelson, "Robotics in the Small," IEEE Robot. Autom. Mag., vol. 14, no. 3, pp. 111-121, Jun. 2007.
4. M. Savia andH.N.Koivo, "Contact micromanipulation-Survey of strategies," IEEE/ASME Trans.Mechatronics, vol. 14, no. 4, pp. 504-514, Aug. 2009.
5. O.Millet, P. Bernardoni, S. Ŕegnier, P. Bidaud, E. Tsitsiris,D. Collard, and L. Buchaillot, "Electrostatic actuated micro gripper using an amplification mechanism," Sens. Actuator A, Phys., vol. 114, no. 2-3, pp. 371-378, 2004.
6. R. Ṕerez, J. Agnus, C. Cĺevy, A. Hubert, and N. Chaillet, "Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation," IEEE/ASME Trans. Mechatronics, vol. 10, no. 2, pp. 161-171, Apr. 2005.
7. W.Driesen, T. Varidel, S. Ŕegnier, and J. M. Breguet, "Micromanipulation by adhesion with two collaborating mobile micro robots," J. Micromech. Microeng., vol. 15, no. 10, pp. S259-S267, 2005.
8. A. Neild, S. Oberti, F. Beyeler, J. Dual, and B. J. Nelson, "A microparticle positioning technique combining an ultrasonic manipulator and a microgripper," J. Micromech. Microeng., vol. 16, no. 8, pp. 1562-1571, 2006.
9. C. D. Onal and M. Sitti, "Visual servoing-based autonomous 2-D manipulation of microparticles using a nanoprobe," IEEE Trans. Control Syst. Tech., vol. 15, no. 5, pp. 842-852, Sep. 2007.
10. K. Y. Kim, X. Y. Liu, Y. Zhang, and Y. Sun, "Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback," J. Micromech. Microeng., vol. 18, no. 5, pp. 055013-1-055013-8, 2008.
11. B. L. Walle, M. Gauthier, and N. Chaillet, "Principle of a submerged freeze gripper for microassembly," IEEE Trans. Robot., vol. 24, no. 4, pp. 897-902, Aug. 2008.
12. C. Elbuken, M. B. Khamesee, andM. Yavuz, "Design and implementation of a micromanipulation system using a magnetically levitated MEMS robot," IEEE/ASME Trans. Mechatronics, vol. 14, no. 4, pp. 434-445, Aug. 2009.
13. H. C. LiawandB. Shirinzadeh, "Neural networkmotion tracking control of piezo-actuated flexure-based mechanisms for micro-/nanomanipulation," IEEE/ASME Trans. Mechatronics, vol. 14, no. 5, pp. 517-527, Oct. 2009.
14. T. Fukuda, F.Arai, and L.X.Dong, "Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations," Proc. IEEE, vol. 91, no. 11, pp. 1803-1818, Nov. 2003.
15. K. Molhave, T. Wich, A. Kortschack, and P. Boggild, "Pick-and-place nanomanipulation using microfabricated grippers," Nanotechnology, vol. 17, no. 10, pp. 2434-2441, 2006.
16. L. X. Dong, F. Arai, and T. Fukuda, "Destructive constructions of nanostructures with carbon nanotubes through nanorobotic manipulation," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 350-357, Jun. 2004.
17. S. Fatikow, T. Wich, H. Hulsen, T. Sievers, and M. Jahnisch, "Microrobot system for automatic nanohandling inside a scanning electron microscope," IEEE/ASME Trans.Mechatronics, vol. 12, no. 3, pp. 244-252, Jun. 2007.
18. L. Bosanac, T. Aabo, P. M. Bendix, and L. B. Oddershede, "Efficient optical trapping and visualization of silver nanoparticles," Nano Lett., vol. 8, no. 5, pp. 1486-1491, 2008.
19. C. Pacoret, R. Bowman, G. Gibson, S. Haliyo, D. Carberry, A. Bergander, S. Ŕegnier, and M. Padgett, "Touching the microworld with forcefeedback optical tweezers," Opt. Exp., vol. 17, no. 12, pp. 10260-10264, 2009.
20. M. Sitti and H. Hashimoto, "Controlled pushing of nanoparticles: Modeling and experiments," IEEE/ASME Trans. Mechatronics, vol. 5, no. 2, pp. 199-211, Jun. 2000.
21. M. Guthold, M. R. Falvo, W. G. Matthews, S. Paulson, S. Washburn, D. A. Erie, R. Superfine, F. P. Brooks, and R. M. Taylor, "Controlled manipulation of molecular samples with the nanomanipulator," IEEE/ASME Trans. Mechatronics, vol. 5, no. 2, pp. 189-198, Jun. 2000.
22. R. Resch, D. Lewis, S. Meltzer, N. Montoya, B. E. Koel, A. Madhukar, A. A. G. Requicha, and P. Will, "Manipulation of gold nanoparticles in liquid environments using scanning force microscopy," Ultramicroscopy, vol. 82, no. 1-4, pp. 135-139, 2000.
23. M. Sitti, "Atomic force microscope probe based controlled pushing for nanotribological characterization," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 343-349, Jun. 2004.
24. Y. J. Yun, C. S. Ah, S. Kim,W. S. Yun, B. C. Park, and D. H. Ha, "Manipulation of freestanding Au nanogears using an atomic force microscope," Nanotechnology, vol. 18, no. 50, pp. 505304-1-505304-5, 2007.
25. M. Sitti, B. Aruk, K. Shintani, and H. Hashimoto, "Scaled teleoperation system for nanoscale interaction and manipulation," Adv. Robot., vol. 17, no. 3, pp. 275-291, 2003.
26. M. Sitti, "Teleoperated 2-dmicro/nanomanipulation using an atomic force microscope," Ph.D. dissertation, Univ. Tokyo, Tokyo, Japan, Sep. 1999.
27. M. Sitti and H. Hashimoto, "Teleoperated touch feedback of surfaces at the nanoscale: Modeling and experiments," IEEE/ASME Trans. Mechatronics, vol. 8, no. 2, pp. 287-298, Jun. 2003.
28. G. Y. Li, N. Xi, M. M. Yu, and W. K. Fung, "Development of augmented reality system for AFM-based nanomanipulation," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 358-365, Jun. 2004.
29. L. Q. Liu, Y. L. Luo, N. Xi, Y. C. Wang, J. B. Zhang, and G. Y. Li, "Sensor referenced real-time videolization of atomic force microscopy for nanomanipulations," IEEE/ASME Trans.Mechatronics, vol. 13, no. 1, pp. 76-85, Feb. 2008.
30. H. Xie and S. Ŕegnier, "Three-dimensional automated micromanipulation using a nanotip gripper with multi-feedback," J. Micromech. Microeng., vol. 19, no. 7, pp. 075009-1-075009-9, 2009.
31. H. Xie, S. Haliyo, and S. Ŕegnier, "A versatile atomic force microscope for three-dimensional nanomanipulation and nanoassembly," Nanotechnology, vol. 20, no. 21, pp. 215301-1-215301-9, 2009.
32. H. Xie, S. Haliyo, and S. Ŕegnier, "Parallel imaging/manipulation force microscopy," Appl. Phy. Lett., vol. 94, no. 15, pp. 153106-1-153106-3, 2009.
33. H. Xie, M. Rakotondrabe, and S. Ŕegnier, "Characterization of the piezoscanner with an optical lever and a reference nanopositioning stage," Rev. Sci. Instrum., vol. 80, no. 4, p. 046102, 2009.
34. K. Lee, M. Duchamp, G.Kulik,A.Magrez, J.W. Seo, S. Jeney, A. J.Kulik, and L. Forro, "Uniformly dispersed deposition of colloidal nanoparticles and nanowires by boiling," Appl. Phys. Lett., vol. 91, no. 17, pp. 173112- 1-173112-3, 2007.