Three-dimensional automated micromanipulation using a nanotip gripper with multi-feedback

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Xie, Hui ^a   Régnier, Stéphane ^a  

^a UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE CANTILEVERS; FORCE SENSING; MICRO ASSEMBLY; MICRO MANIPULATION; MICRO MANIPULATION SYSTEMS; MICRO-OBJECTS; MICRO-PYRAMIDS; MICROPATTERNS; OPTICAL LEVER; PICK-AND-PLACE; RESONANT FREQUENCIES; SHORTEST PATH; SUBMICRON SCALE; THREE-DIMENSIONAL (3D); TRAJECTORY PLANNING; TWO LAYERS;

ATOMIC FORCE MICROSCOPY; GRIPPERS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; MICROSPHERES; NANOCANTILEVERS; NANOTIPS; NATURAL FREQUENCIES;

THREE DIMENSIONAL;

EID: 68249135706     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075009     Document Type: Article

References (33)

1. Dechev N, Cleghorn W L and Mills J K 2004 Microassembly of 3-D microstructures using a compliant, passive microgripper J. Microelectromech. Syst. 13 176-89
2. Xie H, Rong W B and Sun L N 2007 A flexible experimental system for complex microassembly under microscale force and vision-based control Int. J. Optomechatro. 1 80-102
3. Yang G, Gaines J A and Nelson B J 2003 A supervisory wafer-level 3D microassembly system for hybrid MEMS fabrication J. Intell. Robot. Syst. 37 43-68
4. Aokil K, Miyazakl H T, Hirayama H, Inoshita K, Baba T, Sakoda K, Shinya N and Aoyagl Y 2003 Microassembly of semiconductor three dimensional photonic crystals Nat. Mater. 2 117-21
5. Wang W H, Liu X Y, Gelinas D, Brian Ciruna B and Sun Y 2007 A fully automated robotic system for microinjection of zebrafish embryos Plos ONE 9 e862
6. Sun Y and Nelson B J 2002 Biological cell injection using an automated microrobotic system Int. J. Robot. Res. 21 861-8
7. Lu Z, Chen P C Y, Nam J, Ge R W and Lin W 2007 A micromanipulation system with dynamic force-feedback for automatic batch microinjection J. Micromech. Microeng. 17 314-21
8. Gauthier M and Piat E 2006 Control of a particular micro-macro positioning system applied to cell micromanipulation IEEE Trans. Autom. Sci. Eng. 3 264-71
9. Marcy Y, Prost J, Carlier M F and Sykes C 2004 Forces generated during actin-based propulsion: a direct measurement by micromanipulation Proc. Natl. Acad. Sci. USA 101 5992-7
10. Onal C D and Sitti M 2007 Visual servoing-based autonomous 2-D manipulation of microparticles using a nanoprobe IEEE Trans. Control Syst. Technol. 15 842-52
11. Nguyen N T, Ho S S and Low C L N 2004 A polymeric microgripper with integrated thermal actuators J. Micromech. Microeng. 14 969-74
12. Millet O, Bernardoni P, Régnier S, Bidaud P, Tsitsiris E, Collard D and Buchaillot L 2004 Electrostatic actuated micro gripper using an amplification mechanism Sensors Actuators A114 371-8
13. Clévy C, Hubert A, Agnus J and Chaillet N 2005 A micromanipulation cell including a tool changer J. Micromech. Microeng. 15 S292-S301
14. Pérez R, Agnus J, Clévy C, Hubert A and Chaillet N 2005 Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation IEEE-ASME Trans. Mechatro. 10 161-71
15. Carrozza M C, Eisinberg A, Menciassi A, Campolo D, Micera S and Dario P 2000 Towards a force-controlled microgripper for assembling biomedical microdevices J. Micromech. Microeng. 10 271-6
16. Neild A, Oberti S, Beyeler F, Dual J and Nelson B J 2006 A micro-particle positioning technique combining an ultrasonic manipulator and a microgripper J. Micromech. Microeng. 16 1562-71
17. Walle B L, Gauthier M and Chaillet N 2008 Principle of a submerged freeze gripper for microassembly IEEE Trans. Robot. 24 897-902
18. Kim K Y, Liu X Y, Zhang Y and Sun Y 2008 Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback J. Micromech. Microeng. 18 055013
19. Haliyo D S, Dionnet F and Régnier S 2006 Controlled rolling of micro-objects for autonomous manipulation J. Micromechatro. 3 75-101
20. Driesen W, Varidel T, Régnier S and Breguet J M 2005 Micromanipulation by adhesion with two collaborating mobile micro robots J. Micromech. Microeng. 15 S259-67
21. Park I-Y, Sung S-Y, Lee J-H and Lee Y-G 2007 Manufacturing micro-scale structures by an optical tweezers system controlled by five finger tips J. Micromech. Microeng. 17 N82-9
22. Sitti M 1999 Teleoperated 2-D micro/nanomanipulation using an atomic force microscope PhD Thesis University of Tokyo, Japan http://www.cs.cmu.edu/ ∼msitti/pub.html
23. Menciassi A, Eisinberg A, Izzo I and Dario P 2004 From 'macro' to 'micro' manipulation: models and experiments IEEE-ASME Trans. Mechatro. 9 311-20
24. Lambert P and Régnier S 2006 Surface and contact forces models within the framework of microassembly J. Micromechatro. 3 123-57
25. Sitti M 2007 Microscale and nanoscale robotics systems-characteristics, state of the art, and grand challenges IEEE Robot. Autom. Mag. 14 53-60
26. Xie H, Rong W B and Sun L N 2007 Construction and evaluation of a wavelet-based focus measure for microscopy imaging Microsc. Res. Tech. 70 987-95
27. Liu X Y, Wang W H and Sun Y 2007 Dynamic evaluation of autofocusing for automated microscopic analysis of blood smear and pap smear J. Microsc. 227 15-223
28. Xie H, Rong W B, Sun L N and Chen W 2006 Image fusion and 3-D surface reconstruction of microparts using complex valued wavelet transforms IEEE Intl Conf. Image process (Atlanta, GA) pp 2137-40
29. Xie H, Vitard J, Haliyo S and Régnier S 2008 Optical lever calibration in atomic force microscope with a mechanical lever Rev. Sci. Instrum. 79 096101
30. Xie H, Rakotondrabe M and Régnier S 2009 Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage Rev. Sci. Instrum. 80 046102
31. Vögeli B and Känel H von 2000 AFM-study of sticking effects for microparts handling Wear 238 20-4
32. Varenberg M, Etsion I and Halperin G 2003 An improved wedge calibration method for lateral force in atomic force microscopy Rev. Sci. Instrum. 74 3362-7
33. Xie H, Vitard J, Haliyo S and Régnier S 2008 Enhanced accuracy of force application for AFM nanomanipulation using nonlinear calibration of optical Levers IEEE Sensors J 8 1478-85