Visual servoing-based autonomous 2-D manipulation of microparticles using a nanoprobe

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 842-852

  Onal, Cagdas Denizel ^a   Sitti, Metin ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Micromanipulation; Microrobotics; Sliding mode control; Visual servoing

Indexed keywords

DISTANCE-BASED; FLAT GLASS; LINEAR TRAJECTORIES; LYAPUNOV STABILITY CRITERIONS; MICROMANIPULATION; MICROPARTICLES; MICROROBOTICS; OPTICAL MICROSCOPES; PATTERN FORMATIONS; POLYSTYRENE PARTICLES; SLIDING MODES; TARGET POSITIONS; TRAJECTORY PLANNING ALGORITHMS;

ATOMIC FORCE MICROSCOPY; ATOMS; CONTROL THEORY; MICROMANIPULATORS; MICROOPTICS; NANOPROBES; POLYSTYRENES; SLIDING MODE CONTROL; STABILITY CRITERIA; TARGETS; TRAJECTORIES;

VISUAL SERVOING;

EID: 51449091110     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.902944     Document Type: Article

References (33)

1. A. Menciassi, A. Eisinberg, I. Izzo, and P. Dario, "From "macro" to "micro" manipulation: Models and experiments," IEEE Trans. Mechatron., vol. 9, no. 2, pp. 311-320, Jun. 2004.
2. R. S. Fearing, "Survey of sticking effects for micro parts handling," in Proc. IEEE/RSJ Intel. Robots Syst. Conf., 1995, pp. 212-217.
3. M. Sitti, "Microscale and nanoscale robotics systems - Characteristics, state of the art, and grand challenges," IEEE Robot. Autom. Mag., vol. 14, no. 1, pp. 53-60, Mar. 2007.
4. J. J. Gorman and N. G. Dagalakis, "Probe-based micro-scale manipulation and assembly using force feedback," in Proc. 1st Joint Emer. Prep. Response/Robot. Remote Syst. Top. Meeting, 2006, pp. 621-628.
5. A. Burkle, F. Schmoeckel, H. Worn, B. P. Amavasai, F. Caparrelli, and J. R. Travis, "A versatile vision system for micromanipulation tasks," in Proc. Int. Conf. Multisensor Fusion Integr. Intell. Syst., 2001, pp. 271-276.
6. Y. Ahn, T. Ono, and M. Esashi, "Si multiprobes integrated with lateral actuators for independent scanning probe applications," J. Micromech. Microeng., vol. 15, pp. 1224-1229, 2005.
7. F. Dionnet, D. S. Haliyo, and S. Regnier, "Autonomous micromanipulation using a new strategy of accurate release by rolling," in Proc. IEEE/Int. Conf. Robot. Autom., 2004, pp. 5019-5024.
8. T. Kasaya, H. T. Miyazakia, S. Saito, K. Koyano, T. Yamaura, and T. Sato, "Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope," Rev. Sci. Instrum. vol. 75-6, pp. 2033-2042, 2004.
9. S. Saito, T. Motokado, K. J. Obata, and K. Takahashi, "Capillary force with a concave probe-tip for micromampulation," Appl. Phys. Lett. vol. 87-234103, pp. 1-3, 2005.
10. K. Castelino, S. Satyanarayana, and M. Sitti, "Manufacturing of two and three-dimensional micro/nanostructures by integrating optical tweezers with chemical assembly," Robotica, vol. 23, pp. 435-439, 2005.
11. L. Zheng, S. Li, P. J. Burke, and J. P. Brody, "Towards single molecule manipulation with dielectrophoresis using nanoelectrodes," in Proc. IEEE Conf. Nanotechnol., 2003, pp. 437-440.
12. A. Subramanian, B. Vikramaditya, B. J. Nelson, D. Bell, and L. Dong, "Dielectrophoretic micro/nanoassembly with microtweezers and nanoelectrodes," in Proc. Int. Conf. Adv. Robot., 2005, pp. 208-215.
13. K.F. Bohringer, K. Goldberg, M. Cohn, R. Howe, and A. Pisano, "Parallel microassembly with electrostatic force fields," in Proc. IEEE Int. Conf. Robot. Autom., 1998, pp. 1204-1211.
14. A. A. G. Requicha, S. Meltzer, R. Resch, D. Lewis, B. E. Koel, and M. E. Thompson, "Layered nanoassembly of three-dimensional structures," in Proc. IEEE Int. Conf. Robot. Autom., 2001, pp. 3408-3411.
15. V. Utkin, "Variable structure systems with sliding modes," IEEE Trans. Autom. Control, vol. 22, no. 2, pp. 212-222, Apr. 1977.
16. C.D. Onal and A. Sabanovic, "Plant behaviour dictation using a sliding mode model reference controller," in Proc. Int. Workshop Adv. Motion Control (AMC), 2006, pp. 243-248.
17. B. Yilmaz, M. Unel, and A. Sabanovic, "Rigid and affine motion estimation in vision using sliding mode observers," in Proc. IEEE Int. Symp. Ind. Electron. (ISIE), 2005, pp. 31-36.
18. A. Sabanovic, L. M. Fridman, and S. Spurgeon, Variable Structure Systeres: From Principles to Implementation. London, U.K.: The Institute of Electrical Engineers, 2004, vol. 66.
19. E. Lee and H. S. Hong, "An integrated system of microcantilever arrays with carbon nanotube tips for bio/nano analysis: Design and control," in Proc. IEEE Conf. Autom. Sci. Eng., 2005, pp. 113-117.
20. 2," IEEE Trans. Magn., vol. 40, no. 4, pp. 2531-2536, Apr. 2004.
21. M. Sitti and H. Hashimoto, "Controlled pushing of nanoparticles: Modeling and experiments," IEEE/ASME Trans. on Mechatronics, vol. 5, no. 2, pp. 199-211, Jun. 2000.
22. M. Sitti, "Atomic force microscope probe based controlled pushing for nanotribological characterization," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 343-349, Feb. 2004.
23. G. Venture, D. S. Haliyo, S. Regnier, and A. Micaelli, "Force-feedback micromanipulation with unconditionally stable coupling," in Proc. IEEE Int. Conf. Intell. Robot. Syst., 2005, pp. 784-789.
24. A. Ferreira, C. Cassier, and S. Hirai, "Automatic microassembly system assisted by vision serving and virtual reality," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 321-333, Mar. 2004.
25. Y. Shen, N. Xi, W. J. Li, and J. Tan, "A high sensitivity force sensor for microassembly: Design and experiments,"in Proc. IEEE/ASME Int. Conf. Adv. Intell. Mechatron., 2003, pp. 1601-1608.
26. A. Tafazzoli, C.-M. Cheng, C. Pawashe, E. K. Sabo, L. Trofin, M. Sitti, and P. R. LeDuc, "Subfeature patterning of organic and inorganic materials using robotic assembly," J. Mater. Res., vol. 22, no. 6, p., Jun. 2007.
27. R. Duda and P. Hart, "Use of the Hough transform to detect lines and curves in pictures," Commun. ACM, vol. 15, pp. 11-15, 1972.
28. D. H. Ballard, "Generalizing the Hough transform to detect arbitrary shapes," Pattern Recog., vol. 13, pp. 111-122, 1981.
29. L. Xu, E. Oja, and P. Kultanan, "A new curve detection method: Randomized Hough transform (RHT)," Pattern Recog. Lett., vol. 11, no. 5, pp. 331-338, 1990.
30. A.A. Rad, K. Faez, and N. Qaragozlou, C. Sun, H. Talbot, S. Ourselin, and T. Adriaansen, Eds., "Fast circle detection using gradient pair vectors," in Proc. 8th Digit. Image Comput.: Techn. Appl., 2003, pp. 879-888.
31. B. Bhushan, Handbook of Micro/Nano Tribology, 2nd ed. Boca Raton, FL: CRC, 1999.
32. S. Saito, H. T. Miyazaki, T. Sato, and K. Takahashi, "Kinematics of mechanical and adhesional micromampulation under a scanning electron microscope," J. Appl. Phys., vol. 92, no. 9, pp. 5140-5149, 2002.
33. G.V. Dedkov, "Friction on the nanoscale: New physical mechanisms," Mater. Lett., vol. 38, pp. 360-366, 1999.