Design and implementation of a micromanipulation system using a magnetically levitated MEMS robot

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 4, 2009, Pages 434-445

  Elbuken, Caglar ^a   Khamesee, Mir Behrad ^a   Yavuz, Mustafa ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Magnetic levitation; Microelectromechanical systems (MEMS); Microgripper; Micromanipulation; Microrobot

Indexed keywords

CLOSED ENVIRONMENT; FREE MOTION; LASER FOCUSING; MICRO MANIPULATION SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MICROGRIPPER; MICROMANIPULATION; MICROROBOT; MICROROBOTS; MOTION RANGE; NEW TECHNOLOGIES; PHOTO-THERMAL; PICK-AND-PLACE;

COMPOSITE MICROMECHANICS; DATA COMMUNICATION EQUIPMENT; GRIPPERS; MACHINE DESIGN; MAGNETIC FIELDS; MAGNETIC LEVITATION VEHICLES; MAGNETIC MATERIALS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; THREE DIMENSIONAL;

MAGNETIC LEVITATION;

EID: 69549129403     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2023648     Document Type: Article

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