|
Volumn 80, Issue 4, 2009, Pages
|
Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage
|
Author keywords
[No Author keywords available]
|
Indexed keywords
AFM CANTILEVERS;
AFM-BASED NANOMANIPULATION;
ATOMIC FORCE MICROSCOPES;
CLOSED LOOPS;
DISPLACEMENT SENSORS;
LATERAL TRACKING;
NANOPOSITIONING STAGES;
OPTICAL LEVERS;
RELATIVE MOVEMENTS;
SPATIAL DIRECTIONS;
TAPPING MODES;
VOLTAGE INPUTS;
CREEP;
HYSTERESIS;
MICROMANIPULATORS;
NANOTECHNOLOGY;
ATOMIC FORCE MICROSCOPY;
|
EID: 65449187544
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3115184 Document Type: Article |
Times cited : (27)
|
References (15)
|