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Volumn 80, Issue 4, 2009, Pages

Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage

Author keywords

[No Author keywords available]

Indexed keywords

AFM CANTILEVERS; AFM-BASED NANOMANIPULATION; ATOMIC FORCE MICROSCOPES; CLOSED LOOPS; DISPLACEMENT SENSORS; LATERAL TRACKING; NANOPOSITIONING STAGES; OPTICAL LEVERS; RELATIVE MOVEMENTS; SPATIAL DIRECTIONS; TAPPING MODES; VOLTAGE INPUTS;

EID: 65449187544     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3115184     Document Type: Article
Times cited : (27)

References (15)
  • 1
    • 0020128096 scopus 로고
    • 0013-5194 10.1049/el:19820301.
    • C. Newcomb and I. Filnn, Electron. Lett. 0013-5194 10.1049/el:19820301 18, 442 (1982).
    • (1982) Electron. Lett. , vol.18 , pp. 442
    • Newcomb, C.1    Filnn, I.2
  • 6
  • 15
    • 0000880017 scopus 로고    scopus 로고
    • 0034-6748 10.1063/1.1150559.
    • H. Jung and D. Gweon, Rev. Sci. Instrum. 0034-6748 10.1063/1.1150559 71, 1896 (2000).
    • (2000) Rev. Sci. Instrum. , vol.71 , pp. 1896
    • Jung, H.1    Gweon, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.