Highly transparent and conducting fluorine-doped ZnO thin films prepared by pulsed laser deposition

Solar Energy Materials and Solar Cells

Volumn 95, Issue 3, 2011, Pages 894-898

  Cao, Ling ^a   Zhu, Liping ^a   Jiang, Jie ^a   Zhao, Ran ^a   Ye, Zhizhen ^a   Zhao, Buihui ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Electrical and optical properties; Fluorine doped ZnO; Pulsed laser deposition; Transparent conducting oxides

Indexed keywords

C-AXIS ORIENTATIONS; COLUMNAR STRUCTURES; ELECTRICAL AND OPTICAL PROPERTIES; FLUORINE-DOPED ZNO; GLASS SUBSTRATES; OPTICAL TRANSMITTANCE; OXYGEN PRESSURE; PULSED LASER; TRANSPARENT CONDUCTING OXIDE; VISIBLE WAVELENGTHS;

CARRIER CONCENTRATION; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; FILM PREPARATION; FLUORINE; GALVANOMAGNETIC EFFECTS; GLASS LASERS; HALL MOBILITY; OPTICAL PROPERTIES; ORGANIC POLYMERS; OXYGEN; PULSED LASER DEPOSITION; PULSED LASERS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

OPTICAL FILMS;

EID: 78751643518     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.11.012     Document Type: Article

References (30)

1. H.L. Hartnagel, A.L. Dawar, A.K. Jain, and C. Jagadish Semiconducting Transparent Thin Films 1995 Institute of Physics London, pp. 306307
2. T. Minami Present status of transparent conducting oxide thin-film development for indium-tin-oxide (ITO) substitutes Thin Solid Films 516 2008 5822 5828
3. K. Ellmer Resistivity of polycrystalline zinc oxide films: current status and physical limit J. Phys. D 34 2001 3097 3108
4. D.C. Look, G.C. Farlow, P. Reunchan, S. Limpijumnong, S.B. Zhang, and K. Nordlund Evidence for native-defect donors in n-type ZnO Phys. Rev. Lett. 95 2005 225502-1 225502-4
5. T. Minami, and T. Miyata Present status and future prospects for development of non- or reduced-indium transparent conducting oxide thin films Thin Solid Films 517 2008 1474 1477
6. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner Recent progress in processing and properties of ZnO Prog. Mater. Sci. 50 2005 293 340
7. R.G. Gordon Criteria for choosing transparent conductors MRS Bull. 25 2000 52 57
8. J.H. Hu, and R.G. Gordon Textured fluorine-doped ZnO films by atmospheric pressure chemical vapor deposition and their use in amorphous silicon solar cells Sol. Cells 30 1991 437 450
9. 3(0 0 0 1) by plasma-assisted molecular beam epitaxy J. Appl. Phys. 102 2007 073114-1 073114-5
10. Y. Li, G.S. Tompa, S. Liang, C. Gorla, Y. Lu, and J. Doyle Transparent and conductive Ga-doped ZnO films grown by low pressure metal organic chemical vapor deposition J. Vac. Sci. Technol. A 15 1997 1063 1068
11. L. Gong, J.G. Lu, and Z.Z. Ye Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates Sol. Energy Mater. Sol. Cells 94 2010 937 941
12. 2 ratio on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering Mater. Lett. 61 2007 2460 2463
13. M. Ohyama, H. Kozuka, and T. Yoko Solgel preparation of transparent and conductive aluminum-doped zinc oxide films with highly preferential crystal orientation J. Am. Ceram. Soc. 81 1998 1622 1632
14. A.R. Babar, P.R. Deshamukh, R.J. Deokate, D. Haranath, C.H. Bhosale, and K.Y. Rajpure Gallium doping in transparent conductive ZnO thin films prepared by chemical spray pyrolysis J. Phys. D 41 2008 135404-1 135404-6
15. J.H. Kim, B.D. Ahn, C.H. Lee, K.A. Jeon, H.S. Kang, and S.Y. Lee Effect of rapid thermal annealing on electrical and optical properties of Ga doped ZnO thin films prepared at room temperature J. Appl. Phys. 100 2006 113515-1 113515-3
16. A. Maldonadoa, S. Tirado-Guerrab, M. Melendez-Lirac, and M. de la L. Olvera Physical properties of ZnO:F obtained from a fresh and aged solution of zinc acetate and zinc acetylacetonate Sol. Energy Mater. Sol. Cells 90 2006 742 752
17. A. Sanchez-Juarez, A. Tiburcio-Silver, and A. Ortiz Properties of fluorine-doped ZnO deposited onto glass by spray pyrolysis Sol. Energy Mater. Sol. Cells 52 1998 301 311 (Pubitemid 128390498)
18. S. Ilican, Y. Caglar, M. Caglar, and F. Yakuphanoglu Structural, optical and electrical properties of F-doped ZnO nanorod semiconductor thin films deposited by solgel process Appl. Surf. Sci. 255 2008 2353 2359
19. H.Y. Xu, Y.C. Liu, R. Mu, C.L. Shao, Y.M. Lu, D.Z. Shen, and X.W. Fan F-doping effects on electrical and optical properties of ZnO nanocrystalline films Appl. Phys. Lett. 86 2005 123107-1 123107-3
20. H.S. Yoon, K.S. Lee, T.S. Lee, B. Cheong, D.K. Choi, D.H. Kim, and W.M. Kim Properties of fluorine doped ZnO thin films deposited by magnetron sputtering Sol. Energy Mater. Sol. Cells 92 2008 1366 1372
21. J. Hinze, and K. Ellmer In situ measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering J. Appl. Phys. 88 2000 2443 2450
22. M. Chen, Z.L. Pei, X. Wang, C. Sun, and L.S. Wen Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering J. Vac. Sci. Technol. A 19 2001 963 970
23. S.S. Kim, and B.T. Lee Effects of oxygen pressure on the growth of pulsed laser deposited ZnO films on Si(0 0 1) Thin Solid Films 446 2004 307 312
24. 2 Mater. Lett. 63 2009 1621 1623
25. D.H. Kim, N.G. Cho, H.G. Kim, and W.Y. Choi Structural and electrical properties of indium doped ZnO thin films fabricated by RF magnetron sputtering J. Electrochem. Soc. 154 2007 H939 H943
26. A.V. Singh, R.M. Mehra, N. Buthrath, A. Wakahara, and A. Yoshida Highly conductive and transparent aluminum-doped zinc oxide thin films prepared by pulsed laser deposition in oxygen ambient J. Appl. Phys. 90 2001 5661 5665 (Pubitemid 33599700)
27. C.F. Klingshirn, B.K. Meyer, A. Waag, A. Hoffmann, and J. Geurts Zinc Oxide: From Fundamental Properties Towards Novel Applications 2010 Springer New York, pp. 104105
28. xO:(Al,In) thin films J. Appl. Phys. 96 2004 459 467
29. A.K. Das, P. Misra, and L.M. Kukreja Effect of Si doping on electrical and optical properties of ZnO thin films grown by sequential pulsed laser deposition J. Phys. D 42 2009 165405-1 165405-7
30. S. Brehme, F. Fenske, W. Fuhs, E. Nebauer, M. Poschenrieder, B. Selle, and I. Sieber Free-carrier plasma resonance effects and electron transport in reactively sputtered degenerate ZnO:Al films Thin Solid Films 342 1999 167 173