Formation of F-doped ZnO transparent conductive films by sputtering of ZnF2

Materials Letters

Volumn 63, Issue 18-19, 2009, Pages 1621-1623

  Tsai, Yu Zen ^a   Wang, Na Fu ^a   Tsai, Chun Lung ^a  

^a CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

Deposition; F doped ZnO; Sputtering; Thin films

Indexed keywords

DOPED ZNO; ENERGY BANDGAP; F-DOPED ZNO; FLUORINE-DOPED ZNO; GLASS SUBSTRATES; OPTICAL AND ELECTRICAL PROPERTIES; RADIO FREQUENCY MAGNETRON SPUTTERING; THERMAL-ANNEALING; TRANSPARENT CONDUCTIVE FILMS; TRANSPARENT CONDUCTIVE THIN FILMS; VISIBLE REGION; ZNO;

CARRIER CONCENTRATION; ELECTRIC PROPERTIES; FLUORINE; FLUORINE COMPOUNDS; METALLIC FILMS; OPTICAL FILMS; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SEMICONDUCTING ZINC COMPOUNDS; THIN FILMS; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 65749083710     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2009.04.032     Document Type: Article

References (17)

1. Ginley D.S., and Bright C. Mater Res Soc Bull 25 (2000) 15-18
2. Liu W.F., Du G.T., Sun Y.F., Bian J.M., Cheng Y., Yang T.P., et al. Appl Surf Sci 253 (2007) 2999-3003
3. Kim K.H., Wibowo R.A., and Munir B. Mater Lett 60 (2006) 1931-1935
4. Ma Q.B., Ye Z.Z., He H.P., Zhu L.P., Wang J.R., and Zhao B.H. Mater Lett 61 (2007) 2460-2463
5. Ramamoorthy K., Kumar K., Chandramohan R., and Sankaranarayanan K. Mater Sci Eng B 126 (2006) 1-15
6. Olvera M.L., Maldonado A., and Asomoza R. Sol Energy Mater Sol Cells 73 (2002) 425-433
7. Ratheesh Kumar P.M., Sudha Kartha C., Vijayakumar K.P., Singh F., and Avasthi D.K. Mater Sci Eng B 117 (2005) 307-312
8. Hu J., and Gordon R. Sol Cells 30 (1991) 437-450
9. Miyata T., Ida S., and Minami T. J Vac Sci Technol A 21 (2003) 1404-1408
10. Choi B.G., Kim I.H., Kim D.H., Lee K.S., Lee T.S., Cheong B., et al. J Eur Ceram Soc 25 (2005) 2161-2165
11. Lu J., Zhang Y., Ye Z., Wang L., Zhao B., and Huang J. Mater Lett 57 (2003) 3311-3314
12. Yakuphanoglu F., Caglar Y., Ilican S., and Caglar M. Physica B 394 (2007) 86-92
13. Nakanishi Y., Naito S., Nakamura T., Hatanaka Y., and Shimaoka G. Appl Surf Sci 92 (1996) 400-403
14. Ting J.M., and Tsai B.S. Mater Chem Phys 72 (2001) 273-277
15. Fortunato E., Barquinha P., Pimentel A., Goncalves A., Marques A., Pereira L., et al. Thin Solid Films 487 (2005) 205-211
16. Singh J. Optoelectronics: an introduction to materials and devices. 1st ed (1996), Macmillan, New York
17. Burstein E. Phys Rev 93 (1954) 632-633