Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates

Solar Energy Materials and Solar Cells

Volumn 94, Issue 6, 2010, Pages 937-941

  Gong, Li ^a   Lu, Jianguo ^a   Ye, Zhizhen ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Polycarbonate; Radio frequency magnetron sputtering; Transparent conductive oxides; Zinc oxide

Indexed keywords

CONDUCTING PROPERTIES; GA-DOPED ZNO; OXYGEN PARTIAL PRESSURE; POLYCARBONATE SUBSTRATES; POLYMERIC SUBSTRATE; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE DEPOSITION; SPUTTERING PRESSURES; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE REGION;

DEPOSITION; GALLIUM; GALLIUM ALLOYS; MAGNETRON SPUTTERING; OPTOELECTRONIC DEVICES; OXYGEN; PARTIAL PRESSURE; POLYMERIC FILMS; POSITIVE IONS; RADIO; RADIO WAVES; THIN FILMS; ZINC; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 77950867130     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.02.026     Document Type: Review

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