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Applied Physics Letters

Volumn 97, Issue 20, 2010, Pages

Compositional evolution of SiGe islands on patterned Si (001) substrates

(4) Zhang, Jianjun a,b Rastelli, Armando b Schmidt, Oliver G b Bauer, Günther a

a JOHANNES KEPLER UNIVERSITY LINZ (Austria)

b IFW DRESDEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EVOLUTION; COMPOSITION PROFILE; COMPOSITIONAL EVOLUTION; COMPOSITIONAL HOMOGENEITY; FLAT SUBSTRATES; GE FRACTION; NANOTOMOGRAPHY; ORDERED ISLANDS; SI (001) SUBSTRATE; SIGE ISLANDS; SUBSURFACE REGIONS;

ASPECT RATIO; FARM BUILDINGS; GERMANIUM; SILICON ALLOYS;

SILICON;

EID: 78649255432 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3514239 Document Type: Article

Times cited : (24)

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