SiGe growth on patterned Si(001) substrates: Surface evolution and evidence of modified island coarsening

Applied Physics Letters

Volumn 91, Issue 17, 2007, Pages

  Zhang, J J ^a,c   Stoffel, M ^a   Rastelli, A ^d   Schmidt, O G ^d   Jovanovic V ^b   Nanver, L K ^b   Bauer, G ^c  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

BUFFER LAYERS; FABRICATION; PERIODIC STRUCTURES; SURFACE PROPERTIES;

HOLES TRANSFORMS; INVERTED TRUNCATED PYRAMIDS; MULTIFACETED PITS; UNIFORM ISLAND ARRAYS;

SILICON COMPOUNDS;

EID: 35549002618     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2802555     Document Type: Article

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