Shaping site-controlled uniform arrays of SiGe/Si(001) islands by in situ annealing

Applied Physics Letters

Volumn 95, Issue 18, 2009, Pages

  Zhang, J J ^a   Rastelli, A ^b   Groiss, H ^a   Tersoff, J ^c   Schaffler F ^a   Schmidt, O G ^b   Bauer, G ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b IFW DRESDEN   (Germany)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL COMPOSITIONS; EFFECT OF IN; IN-SITU ANNEALING; LATERAL MOTION; PLANAR SUBSTRATE; SI (001) SUBSTRATE; SIGE ISLANDS; SIGE/SI; SUBSTRATE MATERIAL; UNIFORM ARRAY;

ANNEALING;

SUBSTRATES;

EID: 71049126239     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3258648     Document Type: Article

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