Focused ion-beam tomography

Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science

Volumn 35 A, Issue 7, 2004, Pages 1935-1943

  Kubis, A J ^a   Shiflet, G J ^a   Dunn, D N ^b   Hull, R ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMMINUTION; COPPER ALLOYS; DATA REDUCTION; IMAGE QUALITY; IMAGE RECONSTRUCTION; IMAGING TECHNIQUES; ION BEAMS; NANOTECHNOLOGY; NICKEL ALLOYS; PARTICLE SIZE ANALYSIS; TOMOGRAPHY;

DATA COLLECTION; FOCUSED ION BEAM TOMOGRAPHY; QUANTITATIVE INFORMATION;

MATERIALS SCIENCE;

EID: 3442894420     PISSN: 10735623     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11661-004-0142-4     Document Type: Article

References (63)

1. D.C. Copley, J.W. Eberhard, and G.A. Mohr: J. Met., 1994, vol. 46(1), pp. 14-26.
2. M. Defrise: Comput. Med. Imaging Graph., 2001, vol. 25, pp. 113-16.
3. J.W. Owens, L.G. Butler, C. Dupard-Julien, and K. Garner: Mater. Res. Bull., 2001, vol. 36, pp. 1595-1602.
4. L. Babout, E. Maire, J.Y. Buffiere, and R. Fougeres: Acta Mater., 2001, vol. 49, pp. 2055-63.
5. C.L. Lin and J.D. Miller: Chem. Eng. J., 2000, vol. 77, pp. 79-86.
6. D. Lu, M. Zhou, J.H. Dunsmuir, and H. Thomann: Mag. Res. Imaging, 2001, vol. 19, pp. 443-48.
7. C.L. Lin and J.D. Miller: Chem. Eng. J., 2000, vol. 77, pp. 79-86.
8. C.F. Martin, C. Josserond, L. Salvo, J.J. Blandin, P. Cloetens, and E. Boller: Scripta Mater., 2000, vol. 42, pp. 375-81.
9. A. Guvenilir, T.M. Breunig, J.H. Kinney, and S.R. Stock: Acta Mater., 1997, vol. 45 (5) pp. 1977-87.
10. W. Ludwig and D. Bellet: Mater. Sci. Eng., 2000, vol. A281, pp. 198-203.
11. M.A. Mangan and G.J. Shiflet: Scripta Mater., 1997, vol. 37 (4), p. 522.
12. G.E. Soto, S.J. Young, M.E. Martone, T.J. Deerinck, S. Lamont, B.O. Carragher, K. Hama, and M.H. Ellisman: Neuroimage, 1994, vol. 1 (3), pp. 230-43.
13. H. Niedrig and E.I. Rau: Nucl. Instrum. Methods Phys. Res. B, 1998, vol. 142, pp. 523-34.
14. J. Ruprecht and J. Nield: Progr. Biophys. Mol. Bio., 2001, vol. 75, pp. 121-64.
15. R. Magerle: Phys. Rev. Lett., 2000, vol. 85 (13), pp. 2749-52.
16. M.K. Miller: Mater. Characterizations, 2000, vol. 44 (1-2), pp. 11-27.
17. B. Deconihout, C. Pareige, P. Pareige, D. Blavette, and A. Menand: Microsc. Microanal., 1999, vol. 5, pp. 39-47.
18. D. Blavette, A. Bostel, J.M. Sarrau, B. Deconihout, and A. Menand: Nature, 1993, vol. 363, pp. 432-35.
19. D.N. Jamieson: Nucl. Instrum. Meth. Phys. Res. B, 1998, vols. 136-138, pp. 1-13.
20. K.G. Malmqvist: Nucl. Instrum. Meth. Phys. Res. B, 1995, vol. 104, pp. 138-51.
21. R.M.S. Schofield: Nucl. Instrum. Methods Phys. Res. B, 1995, vol. 104, pp. 212-21.
22. A. Sakellariou, M. Cholewa, A. Saint, and G.J.F. Legge: Nucl. Instrum. Methods Phys. Res. B, 1997, vol. 130, pp. 253-58.
23. Y.K. Ng, I. Orlic, S.C. Liew, K.K. Loh, S.M. Tang, T. Osipowicz, and F. Watt: Nucl. Instrum. Methods Phys. Res. B, 1997, vol. 130, pp. 109-12.
24. A. Benninghoven, F.G. Rudenauer, and H.W. Werner: Secondary Ion Mass Spectrometry Basis Concepts, Instrumental Aspects, Applications and Trends, John Wiley & Sons, New York, NY, 1987.
25. H. Hutter and M. Grasserbauer: Mikrochim. Acta, 1992, vol. 107, pp. 137-48.
26. N.S. McIntyre, R.D. Davidson, C.G. Weisener, K.R. Tavlor, F.C. Gonzalez, E.M. Rasile, and A.M. Brennenstuhl: Surf. Interface Anal, 1992, vol. 18, pp. 601-03.
27. S.F. Lu, G.R. Mount, N.S. McIntyre, and A. Fenster: Surf. Interface Anal., 1994, vol. 21, pp. 177-83.
28. H. Hutter, K. Nowikow, and K. Gammer: Appl. Surf. Sci., 2001, vol. 179, pp. 161-66.
29. K. Gammer, S. Musser, and H. Hutter: Appl. Surf. Sci., 2001, vol. 179, pp. 240-44.
30. M.L. Wagter, A.H. Clarke, K.F. Taylor, P.A.W. van der Heide, and N.S. McIntyre: Surf. Interface Anal, 1997, vol. 25, pp. 788-89.
31. F.G. Rudenauer and W. Steiger: Ultramicroscopy, 1988, vol. 24, pp. 115-24.
32. D.N. Dunn and R. Hull: Appl. Phys. Lett., 1999, vol. 75 (21), pp. 3414-16.
33. H. Satoh, M. Owari, and Y. Nihei: J. Vac. Sci. Technol. B, 1991, vol. 9 (5), pp. 2638-41.
34. Y. Nihei: J. Surf. Anal., and 1997, vol. 3 (2), pp. 178-84.
35. Y. Nihei, B. Tomiyasu, T. Sakamoto, and M. Owari: J. Trace Microprobe Techn., 1997, vol. 15 (4), pp. 593-99.
36. B. Tomiyasu, I. Fukuju, H. Komatsubara, M. Owari, and Y. Nihei: Nucl. Instrum. Methods Phys. Res. B, 1998, vols. 136-38, pp. 1028-33.
37. N.J. Montgomery, D.S. McPhail, R.J. Chater, and T. Dingle: in Secondary Mass Spectrometry SIMS X I, G. Gillen, R. Lareau, J. Bennett, and F. Stevie, eds., John Wiley & Sons, New York, NY, 1998, pp. 631-34.
38. Y.Z. Wang, R.W. Revie, M.W. Phaneuf, and J. Li: Fatigue Fract. Eng. Mater. Struct., 1999, vol. 22, pp. 251-56.
39. K. Takanashi, H. Wu, N. Ono, Z.H. Cheng, T. Sakamoto, M. Qwari, and Y. Nihei: Institute of Physics Conf. Ser. No. 165, July 9-13 2000, pp. 355-56.
40. T. Sakamoto, K. Takanashi, Z.H. Cheng, N. Ono, H. Wu, M. Owari, and Y. Nihei: Institute of Physics Conf. Ser. No. 165, July 9-13, 2000, pp. 347-48.
41. R.G. Forbes: Vacuum, 1997, vol. 48 (1), pp. 85-97.
42. J. Gierak, A. Septier, and C. Vieu: Nucl. Instrum. Methods Phys. Res. A, 1999, vol. 427, pp. 91-98.
43. K. Gamo: Nucl. Instrum. Methods Phys. Res. B, 1997, vol. 121, pp. 464-69.
44. J. Orloff: Rev. Sci. Instrum., 1993, vol. 64 (5), pp. 1105-30.
45. FEI Company, Hillsboro, OR.
46. H.E. Schiott: Radiation Effects, 1970, vol. 6, pp. 107-13.
47. J.F. Ziegler, J.P. Beirsack, and U. Littmark: The Stopping and Range of Ions in Solids, 1st ed., Permagon Press Inc., Oxford, United Kingdom, 1985, vol. 1.
48. The program can be found at http://www.srim.org/ with documentation.
49. J.I. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, A.D. Romig, Jr., C.E. Lyman, C. Fiori, and E. Lifshin: Scanning Electron Microscopy and X-Ray Microanalysis, 2nd ed., Plenum Press, New York, NY, 1992, pp. 69-115.
50. M.A. Mangen and G.J. Shiflet: in Solid-Solid Phase Transformations, W.A. Johnson et al., eds., TMS, Warrendale, PA, 1994, pp. 547-51.
51. M.A. Mangen, P.D. Lauren, and G.J. Shiflet: J. Microsc., 1997, vol. 188 (1), pp. 36-41.
52. A. Benninghoven, F.G. Rudenauer, and H.W. Werner: Secondary Ion Mass Spectrometry Basis Concepts, Instrumental Aspects, Applications and Trends, John Wiley & Sons, New York, NY, 1987, pp. 182-217.
53. Photoshop, Version 6.0, Adobe Systems Inc., San Jose, CA.
54. Fovea Pro, Reindeer Graphics Inc., Asheville, NC.
55. C.T. Sims, N.S. Stoloff, and W.C. Hagel: Superalloys II High Temperature Materials for Aerospace and Industrial Power, John Wiley & Sons, New York, NY, 1987, pp. 97-131.
56. MATLAB, Version 6.0, The Mathworks Inc., Natick, MA.
57. G.T. Herman, J. Zheng, and C.A. Bucholtz: IEEE Comput. Graphics Appl., 1992, vol. 12 (5), pp. 69-79.
58. S.P. Raya and J.K. Udupa: IEEE Trans. Med. Imaging, 1990, vol. 9 (1), pp. 32-42.
59. E. Haines: Graphics Gems IV, AP Professional, New York, NY, 1994, pp. 24-46.
60. AVS, Release 5.5, Advanced Visual Systems, Waltham, MA.
61. Noesys T3D, Fortner Software, Sterling, VA.
62. D.N. Dunn, G.J. Shiflet, and R. Hull: Rev. Sci. Instrum., 2002, vol. 73 (2), pp. 330-34.
63. An example of an animation can be found linked to