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Thin Solid Films

Volumn 518, Issue 22, 2010, Pages 6382-6384

Deep level transient spectroscopy on charge traps in high-k ZrO2

(3) Li, Hua Min a Zhang, Gang a Yoo, Won Jong a

a Sungkyunkwan University (South Korea)

Author keywords

Cross section; Deep traps; DLTS; High k; Trap depth; ZrO2

Indexed keywords

CROSS SECTION; DEEP TRAPS; DLTS; HIGH-K; TRAP DEPTH; ZRO2;

DIELECTRIC MATERIALS; FLASH MEMORY; HOLE CONCENTRATION; HOLE TRAPS; THRESHOLD VOLTAGE; ZIRCONIUM ALLOYS;

DEEP LEVEL TRANSIENT SPECTROSCOPY;

EID: 77956061535 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.03.137 Document Type: Conference Paper

Times cited : (7)

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