Application of zero-temperature-gradient zero-bias thermally stimulated current spectroscopy to ultrathin high-dielectric-constant insulator film characterization

Applied Physics Letters

Volumn 88, Issue 17, 2006, Pages

  Lau, W S ^a   Wong, K F ^a   Han, Taejoon ^b   Sandler, Nathan P ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TANTALUM OXIDE; TEMPERATURE GRADIENT; ZERO-BIAS THERMALLY STIMULATED CURRENT (ZBTSC);

ELECTRIC CURRENTS; PERMITTIVITY; SEMICONDUCTOR INSULATOR BOUNDARIES; SPECTROSCOPIC ANALYSIS; TANTALUM COMPOUNDS; THERMAL EFFECTS;

ULTRATHIN FILMS;

EID: 33646425087     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2199590     Document Type: Article

References (20)

1. A. Ishitani, P. Lesaicherre, S. Kamiyama, K. Ando, and H. Watanabe, IEICE Trans. Electron. E76-C, 1564 (1993).
2. K. S. Tang, W. S. Lau, and G. S. Samudra, IEEE Circuits Devices Mag. 13, 27 (1997).
3. M. Hiratani, S. Kimura, T. Hamada, S. Iijima, and N. Nakanishi, Appl. Phys. Lett. 81, 2433 (2002).
4. Y. Matsui, M. Hiratani, I. Sano, and S. Kimura, Tech. Dig. - Int. Electron Devices Meet. 2002, 225.
5. H. Miki, Y. Shimamoto, and R. Furukawa, IEEE Trans. Electron Devices 52, 1832 (2005).
6. W. S. Lau, T. S. Tan, N. P. Sandler, and B. S. Page, Jpn. J. Appl. Phys., Part 1 34, 757 (1995).
7. W. Zhu, J.-P. Han, and T. P. Ma, IEEE Trans. Electron Devices 51, 98 (2004).
8. K. A. McKinley and N. P. Sandler, Thin Solid Films 290-291, 440 (1996).
9. W. S. Lau, L. Zhong, A. Lee, C. H. See, T. Han, N. P. Sandler, and T. C. Chong, Appl. Phys. Lett. 71, 500 (1997).
10. W. S. Lau, L. L. Leong, T. Han, and N. P. Sandler, Appl. Phys. Lett. 83, 2835 (2003).
11. W. S. Lau, T. C. Chong, L. S. Tan, C. H. Goo, and K. S. Goh, Jpn. J. Appl. Phys., Part 2 30, L1843 (1991).
12. B. Santic and U. V. Desnica, Appl. Phys. Lett. 56, 2636 (1990).
13. W. S. Lau, K. K. Khaw, P. W. Qian, N. P. Sandler, and P. K. Chu, Jpn. J. Appl. Phys., Part 1 35, 2599 (1996).
14. W. S. Lau, P. W. Qian, N. P. Sandler, K. A. McKinley, and P. K. Chu, Jpn. J. Appl. Phys., Part 1 36, 661 (1997).
15. W. S. Lau, G. Zhang, L. L. Leong, P. W. Qian, T. Han, J. Das, N. P. Sandler, and P. K. Chu, Mater. Res. Soc. Symp. Proc. 864, E4.22.1 (2005).
16. A. W. van Herwaarden, Sens. Actuators 6, 245 (1984).
17. W. S. Lau, U.S. Patent No. 6,909,273 (21 June 2005).
18. W. S. Lau and T. Han, Appl. Phys. Lett. 86, 152107 (2005).
19. F. G. Ullman, J. Phys. Chem. Solids 28, 279 (1967).
20. W. S. Lau, L. Zhong, T. Han, and N. P. Sandler, Mater. Res. Soc. Symp. Proc. 864, E3.2.1 (2005).