Spectroscopic studies of metal high-k dielectrics: Transition metal oxides and silicates, and complex rare earth/transition metal oxides

Physica Status Solidi (B) Basic Research

Volumn 241, Issue 10, 2004, Pages 2221-2235

  Lucovsky, G ^a,b   Hong, J G ^b   Fulton, C C ^b   Zou, Y ^a   Nemanich, R J ^a   Ade, H ^a   Scholm, D G ^c   Freeouf, J L ^d  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

^d OREGON HEALTH AND SCIENCE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4644370909     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssb.200404938     Document Type: Conference Paper

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