|
Volumn 518, Issue 18, 2010, Pages 5227-5232
|
Synthesis and characterization of Cu3N-WC nanocomposite films prepared by direct current magnetron sputtering
|
Author keywords
Copper nitride; Magnetron sputtering; Nanocomposites; Tribology; Tungsten carbide
|
Indexed keywords
COPPER NITRIDE;
CU TARGET;
DEFORMATION RESISTANCE;
DIRECT CURRENT MAGNETRON SPUTTERING;
FRICTION COEFFICIENTS;
HARD PHASIS;
NANOCOMPOSITE FILM;
SOFT LUBRICANTS;
SYNTHESIS AND CHARACTERIZATIONS;
TARGET POWER;
UNIFORM DISTRIBUTION;
AMORPHOUS FILMS;
FRICTION;
HARDNESS TESTING;
MAGNETRON SPUTTERING;
NANOCOMPOSITES;
TITANIUM NITRIDE;
TRIBOLOGY;
TUNGSTEN;
TUNGSTEN CARBIDE;
WEAR RESISTANCE;
COPPER;
|
EID: 77955662500
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.053 Document Type: Article |
Times cited : (8)
|
References (37)
|