Structures and nanoindentation properties of nanocrystalline and amorphous Ta-W thin films

Scripta Materialia

Volumn 58, Issue 3, 2008, Pages 195-198

  Wang, C L ^a   Zhang, M ^a   Chu, J P ^b   Nieh, T G ^a  

^a University of Tennessee   (United States)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Grain size effect; Hardness; Modulus; Nanocrystalline Ta W; Solid state amorphization

Indexed keywords

AMORPHIZATION; ELASTIC MODULI; GRAIN SIZE AND SHAPE; HARDNESS; NANOCRYSTALLINE MATERIALS; SOLID STATE REACTIONS; SPUTTER DEPOSITION;

AMORPHOUS STRUCTURE; SUBSTRATE TEMPERATURES;

THIN FILMS;

EID: 36048938470     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.09.042     Document Type: Article

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