Comparison in mechanical and tribological properties of Cr-W-N and Cr-Mo-N multilayer films deposited by DC reactive magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 10, 2008, Pages 2189-2193

  Gu, B ^a   Tu, J P ^a   Zheng, X H ^a,b   Yang, Y Z ^a   Peng, S M ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Mechanical property; Metal nitride; Multilayer; Tribological property

Indexed keywords

CRYSTALLINE MATERIALS; FRICTION; MAGNETRON SPUTTERING; MORPHOLOGY; MULTILAYER FILMS; NITRIDES; REACTIVE SPUTTERING; STEEL; TRIBOLOGY; WEAR RESISTANCE;

DC REACTIVE MAGNETRON SPUTTERING; FRICTION COEFFICIENT; METAL NITRIDE;

INORGANIC COATINGS;

CRYSTALLINE MATERIALS; FRICTION; INORGANIC COATINGS; MAGNETRON SPUTTERING; MORPHOLOGY; MULTILAYER FILMS; NITRIDES; REACTIVE SPUTTERING; STEEL; TRIBOLOGY; WEAR RESISTANCE;

EID: 38049143840     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.09.006     Document Type: Article

References (25)

1. Sproul W.D. Science 273 (1996) 889
2. Tu J.P. Corros. Sci. 42 (2000) 147
3. Tu J.P., Zhu L.P., and Zhao H.X. Surf. Coat. Technol. 122 (1999) 176
4. Veprek S., Reiprich S., and Li S.Z. Appl. Phys. Lett. 66 (1995) 2640
5. Musil J. Surf. Coat. Technol. 125 (2000) 322
6. Hauert R., and Patscheider J. Adv. Eng. Mater. 2 5 (2000) 247
7. Navinsek B., Panjan P., and Milosev I. Surf. Coat. Technol. 97 (1997) 182
8. PalDey S., and Deevi S.C. Mater. Sci. Eng., A 342 (2003) 58
9. Hultman L. Vacuum 57 (2000) 1
10. Hovsepian P.Eh., Lewis D.B., and Munz W.-D. Surf. Coat. Technol. 133-134 (2000) 166
11. Liu C., Leyland A., Bi Q., and Matthews A. Surf. Coat. Technol. 141 (2001) 164
12. Cremer R., and Neuschutz D. Surf. Coat. Technol. 146-147 (2001) 229
13. Hones P., Consiglio R., Randall N., and Levy F. Surf. Coat. Technol. 125 (2000) 179
14. Yao S.H., Su Y.L., Kao W.H., and Cheng K.W. Surf. Coat. Technol. 201 (2006) 2520
15. Kim K.H., Choi E.Y., Hong S.G., Park B.G., Yoon J.H., and Yong J.H. Surf. Coat. Technol. 201 (2006) 4068
16. Luo Q., Rainforth W.M., and Munz W.D. Scr. Mater. 45 (2005) 399
17. Holleck H., and Schier V. Surf. Coat. Technol. 76-77 (1995) 328
18. Ehiasarian A.P., Hovsepian P.Eh., Hultman L., and Helmersson U. Thin Solid Films 457 (2004) 270
19. Tsui T.Y., Pharr G.M., Oliver W.C., Bhatia C.S., and White R.L. Mater. Res. Soc. Symp. Proc. 383 (1995) 447
20. Tsui T.Y., and Pharr G.M. J. Mater. Res. 14 1 (1999) 292
21. Pharr G.M. Mater. Sci. Eng., A 253 (1998) 151
22. Musil J., Kunc F., Zeman H., and Polakova H. Surf. Coat. Technol. 154 (2002) 304
23. Chang Y.Y., Yang D.Y., and Hung C.Y. Surf. Coat. Technol. 200 (2005) 1702
24. Yang Q., and Zhao L.R. Surf. Coat. Technol. 200 (2005) 1709
25. Wu F.-B., Tien S.-K., Lee J.-W., and Duh J.-G. Surf. Coat. Technol. 200 (2006) 3194