Detection of arsenic dopant atoms in a silicon crystal using a spherical aberration corrected scanning transmission electron microscope

Physical Review B - Condensed Matter and Materials Physics

Volumn 81, Issue 3, 2010, Pages

  Oshima, Y ^a,b   Hashimoto, Y ^a,b   Tanishiro, Y ^a,b   Takayanagi, K ^a,b   Sawada, H ^a,c   Kaneyama, T ^a,c   Kondo, Y ^a,c   Hashikawa, N ^d   Asayama, K ^d  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c JEOL LTD   (Japan)

^d RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77954825232     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.81.035317     Document Type: Article

References (27)

1. T. Mizuno, J. Okumtura, and A. Toriumi, IEEE Trans. Electron Devices 41, 2216 (1994). 10.1109/16.333844
2. B. Hoeneisen and C. A. Mead, Solid-State Electron. 15, 819 (1972). 10.1016/0038-1101(72)90103-7
3. R. W. Keyes, IEEE J. Solid-State Circuits 10, 245 (1975). 10.1109/JSSC.1975.1050600
4. H.-S. Wong and Y. Taur, Tech. Dig.-Int. Electron Devices Meet. 1993, 705.
5. M. R. Castell, D. A. Muller, and P. M. Voyles, Nature Mater. 2, 129 (2003). 10.1038/nmat840
6. S. Roy and A. Asenov, Science 309, 388 (2005). 10.1126/science.1111104
7. See International Technology Roadmap for Semiconductor (ITRS) Report for supplementary online material, Update 2008. For more information on ITRS, see http://public.itrs.net/reports.html
8. A. Asenov, Nanotechnology 10, 153 (1999). 10.1088/0957-4484/10/2/309
9. T. Shinada, S. Okamoto, T. Kobayashi, and I. Ohdomari, Nature (London) 437, 1128 (2005). 10.1038/nature04086
10. H. Fukutome, Y. Momiyama, E. Yoshida, M. Okuno, and T. Itakura, Tech. Dig.-Int. Electron Devices Meet., 2005, 897. 10.1109/IEDM.2005.1609502
11. L. Zhang, K. Ohuchi, K. Adachi, K. Ishimaru, M. Takayanagi, and A. Nishiyama, Appl. Phys. Lett. 90, 192103 (2007). 10.1063/1.2736206
12. N. D. Browning, M. F. Chisholm, and S. J. Pennycook, Nature (London) 366, 143 (1993). 10.1038/366143a0
13. P. M. Voyles, D. A. Muller, J. L. Grazul, P. H. Citrin, and H. J. L. Gossmann, Nature (London) 416, 826 (2002). 10.1038/416826a
14. P. M. Voyles, J. L. Grazul, and D. A. Muller, Ultramicroscopy 96, 251 (2003). 10.1016/S0304-3991(03)00092-5
15. T. Yamazaki, K. Watanabe, Y. Kikuchi, M. Kawasaki, I. Hashimoto, and M. Shiojiri, Phys. Rev. B 61, 13833 (2000). 10.1103/PhysRevB.61.13833
16. K. Thompson, P. L. Flaitz, P. Ronsheim, D. J. Larson, and T. F. Kelly, Science 317, 1370 (2007). 10.1126/science.1145428
17. M. F. Chisholm, A. Maiti, S. J. Pennycook, and S. T. Pantelides, Phys. Rev. Lett. 81, 132 (1998). 10.1103/PhysRevLett.81.132
18. M. Haider, S. Uhlemann, E. Schwan, H. Rose, B. Kabius, and K. Urban, Nature (London) 392, 768 (1998). 10.1038/33823
19. O. L. Krivanek, N. Dellby, and A. R. Lupini, Ultramicroscopy 78, 1 (1999). 10.1016/S0304-3991(99)00013-3
20. C. L. Jia, M. Lentzen, and K. Urban, Science 299, 870 (2003). 10.1126/science.1079121
21. S. J. Pennycook, M. Varela, C. J. D. Hetherington, and A. I. Kirkland, MRS Bull. 31, 36 (2006).
22. H. Sawada, F. Hosokawa, T. Kaneyama, T. Ishizawa, M. Terao, M. Kawazoe, T. Sannomiya, T. Tomita, Y. Kondo, T. Tanaka, Y. Oshima, Y. Tanishiro, N. Yamamoto, and K. Takayanagi, Jpn. J. Appl. Phys., Part 2 46, L568 (2007). 10.1143/JJAP.46.L568
23. E. C. Cosgriff and P. D. Nellist, Ultramicroscopy 107, 626 (2007). 10.1016/j.ultramic.2006.12.004
24. A. Y. Borisevich, A. R. Lupini, S. Travaglini, and S. J. Pennycook, J. Electron Microsc. 55, 7 (2006). 10.1093/jmicro/dfi075
25. D. W. Marquardt, SIAM J. Appl. Math. 11, 431 (1963). 10.1137/0111030
26. K. Ishizuka, Ultramicroscopy 90, 71 (2002). 10.1016/S0304-3991(01)00145-0
27. D. J. Chadi, P. H. Citrin, C. H. Park, D. L. Adler, M. A. Marcus, and H. J. Gossmann, Phys. Rev. Lett. 79, 4834 (1997). 10.1103/PhysRevLett.79.4834