Depth sectioning of aligned crystal with the aberration-corrected scanning transmission electron microscope

Journal of Electron Microscopy

Volumn 55, Issue 1, 2006, Pages 7-12

  Borisevich, Albina Y ^a   Lupini, Andrew R ^a   Travaglini, Samuel ^b   Pennycook, Stephen J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b HARDING UNIVERSITY   (United States)

Author keywords

Aberration correction; Depth sectioning; Electron channeling; Scanning transmission electron microscopy

Indexed keywords

ABERRATIONS; ELECTRONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY;

ABERRATION CORRECTION; ABERRATION-CORRECTED; DEPTH RESOLUTION; DEPTH SECTIONING; ELECTRON CHANNELING; NANO-METER-SCALE; OPTICAL SECTIONING; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SCANNING TRANSMISSION ELECTRON MICROSCOPY; TRANSVERSE RESOLUTION;

CRYSTALLINE MATERIALS;

EID: 33646750094     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfi075     Document Type: Article

References (25)

1. Urban K, Kabius B, Haider M, and Rose H (1999) A way to higher resolution: spherical-aberration correction in a 200 kV transmission electron microscope. J. Electron Microsc. 48: 821-826.
2. Krivanek O L, Dellby N, and Lupini A R (1999) Towards sub-angstrom electron beams. Ultramicroscopy 78: 1-11.
3. Nellist P D, Chisholm M F, Dellby N, Krivanek O L, Murfitt M F, Szilagyi Z S, Lupini A R, Borisevich A, Sides W H, and Pennycook S J (2004) Direct sub-angstrom imaging of a crystal lattice. Science 305: 1741.
4. Chisholm M F, Lupini A R, Pennycook S J, Ohkubo I, Christen H M, Findlay S D, Oxley M P, and Allen L J (2004) Simultaneous Z-contrast and phase contrast imaging of oxygen in ceramic interfaces. Microsc. Microanal. 10: 256-257.
5. Pennycook S J, Lupini A R, Kadavanich A, McBride J R, Rosenthal S J, Puetter R C, Yahil A, Krivanek O L, Dellby N, Nellist P D L, Duscher G, Wang L G, and Pantelides S T (2003) Aberration-corrected scanning transmission electron microscopy: the potential for nano- and interface science. Zeitschrift Fur Metallkunde 94: 350-357.
6. Wang S W, Borisevich A Y, Rashkeev S N, Glazoff M V, Sohlberg K, Pennycook S J, and Pantelides S T (2004) Dopants adsorbed as single atoms prevent degradation of catalysts. Nat. Mater. 3: 143-146.
7. Varela M, Lupini A R, van Benthem K, Borisevich A Y, Chisholm M F, Shibata N, Abe E, and Pennycook S J (2005) Materials characterization in the aberration-corrected scanning transmission electron microscope. Ann. Rev. Mater. Res. 35: 539-569.
8. Crewe A V, Wall J, and Langmore J (1970) Visibility of single atoms. Science 168: 1338-1340.
9. Nellist P D, and Pennycook S J (1996) Direct imaging of the atomic configuration of ultradispersed catalysts. Science 274: 413-415.
10. Suenaga K, Tence T, Mory C, Colliex C, Kato H, Okazaki T, Shinohara H, Hirahara K, Bandow S, and Iijima S (2000) Element-selective single atom imaging. Science 290: 2280-2282.
11. Voyles P M, Muller D A, Grazul J L, Citrin P H, and Gossmann H J L (2002) Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si. Nature 416: 826-829.
12. Varela M, Findlay S D, Lupini A R, Christen H M, Borisevich A Y, Dellby N, Krivanek O L, Nellist P D, Oxley M P, Allen L J, and Pennycook S J (2004) Spectroscopic imaging of single atoms within a bulk solid. Phys. Rev. Lett. 92: 095502.
13. Wilson T (1990) Confocal Microscopy. Academic Press, San Diego.
14. van Benthem K, Lupini A R, Kim M, Baik H S, Doh S, Lee J H, Oxley M P, Findlay S D, Allen L J, Luck J T, and Pennycook S J (2005) Three-dimensional imaging of individual hafnium atoms inside a semiconductor device. Appl. Phys. Lett. 87: 034104.
15. Borisevich A Y, Lupini A R, and Pennycook S J (2006) Depth sectioning with the aberration-corrected scanning transmission electron microscope. Proc. Natl Acad. Sci. USA 103: 3044-3048.
16. Fertig J, and Rose H (1981) Resolution and contrast of crystalline objects in high-resolution scanning transmission electron microscopy. Optik 59: 407-429.
17. Hillyard S, Loane R F, and Silcox J (1993) Annular dark-field imaging - resolution and thickness effects. Ultramicroscopy 49: 14-25.
18. Nakamura K, KaKibayashi H, Kanehori K, and Tanaka N (1997) Position dependence of the visibility of a single gold atom in silicon crystals in HAADF-STEM image simulation. J. Electron Microsc. 46: 33-43.
19. Voyles P M, Grazul J L, and Muller D A (2003) Imaging individual atoms inside crystals with ADF-STEM. Ultramicroscopy 96: 251-273.
20. Voyles P M, Muller D A, and Kirkland E J (2004) Depth-dependent imaging of individual dopant atoms in silicon. Microsc. Microanal. 10: 291-300.
21. Anstis G R, Cai D Q, and Cockayne D J H (2003) Limitations on the s-state approach to the interpretation of sub-angstrom resolution electron microscope images and microanalysis. Ultramicroscopy 94: 309-327.
22. Peng Y P, Nellist P D, and Pennycook S J (2004) HAADF-STEM imaging with sub-angstrom probes: a full Bloch wave analysis. J. Electron Microsc. 53: 257-266.
23. Kirkland E J (1998) Advanced Computing in Electron Microscopy. Plenum Press, New York.
24. 3 - structure and space group. Acta Crystallogr. C-Crystal Struct. Commun. 43: 1668-1674.
25. Born M, and Wolf E (1989) Principles of Optics: Electromagnetic Theory of Propagation, Interference, and Diffraction of Light. (Pergamon Press, New York).