Imaging individual atoms inside crystals with ADF-STEM

Ultramicroscopy

Volumn 96, Issue 3-4, 2003, Pages 251-273

  Voyles, P M ^a,b   Grazul, J L ^a   Muller, D A ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

ADF STEM; Electron channeling; Impurity atoms; Z contrast

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CRYSTAL DEFECTS; CRYSTALS; IMAGE ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRICAL INACTIVITY;

IMAGING TECHNIQUES;

ANTIMONY; SILICON;

ANALYTIC METHOD; ATOMIC PARTICLE; CONFERENCE PAPER; CRYSTAL STRUCTURE; IMAGE ANALYSIS; IMAGE PROCESSING; IMAGING SYSTEM; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SIMULATION; SURFACE PROPERTY; THEORY;

EID: 0038163517     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00092-5     Document Type: Conference Paper

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