Two-dimensional distribution of As atoms doped in a Si crystal by atomic-resolution high-angle annular dark field STEM

Physical Review B - Condensed Matter and Materials Physics

Volumn 61, Issue 20, 2000, Pages 13833-13839

  Yamazaki, T ^a   Watanabe, K ^a   Kikuchi, Y ^a   Kawasaki, M ^a   Hashimoto, I ^a   Shiojiri, M ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000951920     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.61.13833     Document Type: Article

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