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Volumn 21, Issue 29, 2010, Pages

Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating

Author keywords

[No Author keywords available]

Indexed keywords

AU NANORODS; DENSE STRUCTURES; FABRICATION METHOD; FRESNEL ZONE PLATE; HIGH ASPECT RATIO; HIGH ASPECT RATIO NANO-STRUCTURES; HIGH CONTRAST; IMPROVED PROCESS; LINE-WIDTH CONTROL; METALLIC NANOSTRUCTURE; REGULAR ARRAY; SPLIT-RING RESONATOR; THICK LAYERS;

EID: 77954416817     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/29/295303     Document Type: Article
Times cited : (95)

References (38)
  • 1
    • 34748847241 scopus 로고    scopus 로고
    • (Science of Microscopy) ed P W Hawkes and J C H Spence (New York: Springer), ISBN 978-0-387-25296-4 (Print) 978-0-387-49762-4 (Online)
    • see, for example: Howells M, Jacobsen C, Warwick T and van den Bos A 2008 Principles and Applications of Zone Plate X-Ray Microscopes (Science of Microscopy) ed P W Hawkes and J C H Spence (New York: Springer) pp835-926 ISBN 978-0-387-25296-4 (Print) 978-0-387-49762-4 (Online) 2008
    • (2008) Principles and Applications of Zone Plate X-Ray Microscopes , pp. 835-926
    • Howells, M.1    Jacobsen, C.2    Warwick, T.3    Van Den Bos, A.4
  • 27
    • 0004195337 scopus 로고
    • (New York: McGraw-Hill) ISBN 0070388369
    • Lowenheim F 1978 Electroplating (New York: McGraw-Hill) ISBN 0070388369
    • (1978) Electroplating
    • Lowenheim, F.1
  • 38
    • 33746478163 scopus 로고    scopus 로고
    • Küpper D, Küpper D, Wahlbrink T, Bolten J, Lemme M C, Georgiev Y M and Kurz H 2006 J. Vac. Sci. Technol. B 24 1827
    • (2006) J. Vac. Sci. Technol. , vol.24 , pp. 1827
    • Küpper D, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.