Megasonic-assisted development of nanostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1827-1832

  Küpper, David ^a   Küpper, Daniel ^a   Wahlbrink, Thorsten ^a   Bolten, Jens ^a   Lemme, Max C ^a   Georgiev, Yordan M ^a   Kurz, Heinrich ^a  

^a AMO GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; DIFFRACTION GRATINGS; ELECTRON BEAMS; MICROELECTRONICS; POLYMETHYL METHACRYLATES; SENSITIVITY ANALYSIS;

ACOUSTIC AGITATION; CONVENTIONAL DIP DEVELOPMENT; MEGASONIC AGITATION; NANOPATTERNS;

NANOSTRUCTURED MATERIALS;

EID: 33746478163     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2214709     Document Type: Article

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