Full-field hard x-ray microscopy below 30 nm: A challenging nanofabrication achievement

Nanotechnology

Volumn 19, Issue 39, 2008, Pages

  Chen, Yu Tung ^a,b   Lo, Tsung Nan ^a   Chu, Yong S ^c   Yi, Jaemock ^c   Liu, Chi Jen ^a   Wang, Jun Yue ^a   Wang, Cheng Liang ^a   Chiu, Chen Wei ^a   Hua, Tzu En ^a   Hwu, Yeukuang ^a,d,e,f   Shen, Qun ^c   Yin, Gung Chian ^f   Liang, Keng S ^f   Lin, Hong Ming ^b   Je, Jung Ho ^g   Margaritondo, Giorgio ^h  

^a INSTITUTE OF PHYSICS   (Taiwan)

^b TATUNG UNIVERSITY   (Taiwan)

^c ARGONNE NATIONAL LABORATORY   (United States)

^d NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^e NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^f NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^g Pohang University of Science and Technology (POSTECH)   (South Korea)

^h EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY; PHOTORESISTS; X RAY MICROSCOPES;

FEATURE SIZES; HARD X RAYS; NANO-FABRICATION;

ASPECT RATIO;

NANOMATERIAL;

ARTICLE; ELECTROCHEMISTRY; ELECTRON BEAM; MEASUREMENT; NANOFABRICATION; PRIORITY JOURNAL; TRANSMISSION ELECTRON MICROSCOPY; X RAY MICROANALYSIS;

EID: 51349139918     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/39/395302     Document Type: Article

References (11)

1. Yun W, Lai B, Krasnoperova A, Di Fabrizio E, Cai Z, Cerrina F, Chen Z, Gentili M and Gluskin E 1999 Rev. Sci. Instrum. 70 3537
2. Attwood D 1999 Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge: Cambridge University Press) p 337
3. Lo T N et al 2007 J. Phys. D: Appl. Phys. 40 3172
4. Chao W, Harteneck B D, Liddle J A, Anderson E H and Attwood D T 2005 Nature 435 1210
5. Chen Y T et al 2008 J. Synchrotron Radiat. 15 170
6. Yin G C, Song Y F, Tang M T, Chen F R, Liang K S, Duewer F W, Feser M, Yun W and Shieh H P D 2006 Appl. Phys. Lett. 89 221122
7. Chu Y S et al 2008 Appl. Phys. Lett. 92 103119
8. Chao W, Anderson E, Denbeaux G P, Harteneck B, Liddle J A, Olynick D L, Pearson A L, Salmassi F, Song C Y and Attwood D T 2003 Opt. Lett. 28 2019
9. Vogt S, Schneider G, Steuernagel A, Lucchesi J, Schulze E, Rudolph D and Schmahl G 2000 J. Struct. Biol. 132 123
10. Neeff T, Dutra L V, Santos J R D, Freitas C C and Araujo L S 2005 J. Remote Sensing 26 13
11. Michette A G, Buckley C J and Pfauntsch S J 1997 Opt. Commun. 141 118