Multiplexed electrical sensor arrays in microfluidic networks

Sensors and Actuators, B: Chemical

Volumn 136, Issue 2, 2009, Pages 350-358

  Cole, Matthew C ^a   Kenis, Paul J A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Electrical sensors; Microfluidic sensing; Multiplexing; Sensor arrays

Indexed keywords

INTEGRATION TESTING; MICROFLUIDICS; MULTIPLEXING; SENSOR ARRAYS;

ARRAY OF SENSORS; ELECTRICAL COMPONENTS; ELECTRICAL CONTACTS; ELECTRICAL LEADS; ELECTRICAL SENSORS; MICROFLUIDIC NETWORKS; MICROFLUIDIC PLATFORMS; SENSING ELEMENTS;

CAPACITIVE SENSORS;

EID: 77954325269     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.12.010     Document Type: Article

References (57)

1. M. U. Kopp, A. J. De Mello, A. Manz, Chemical amplification: continuous-flow PCR on a chip, Science 280 (1998) 1046-1048.
2. N. A. Lacher, K. E. Garrison, R. S. Martin, S. M. Lunte, Microchip capillary electrophoresis/electrochemistry, Electrophoresis 22 (2001) 2526-2536.
3. S. Gawad, L. Schild, P. Renaud, Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing, Lab Chip 1 (2001) 76-82.
4. T. Thorsen, S. J. Maerkl, S. R. Quake, Microfluidic large-scale integration, Science 298 (2002) 580-584.
5. E. R. Choban, L. J. Markoski, A. Wieckowski, P. J. A. Kenis, Microfluidic fuel cell based on laminar flow, J. Power Sources 128 (2004) 54-60.
6. J. Su, M. R. Bringer, R. F. Ismagilov, M. Mrksich, Combining microfluidic networks and peptide arrays for multi-enzyme assays, J. Am. Chem. Soc. 127 (2005) 7280-7281.
7. L. Li, J. Q. Boedicker, R. F. Ismagilov, Using a multijunction microfluidic device to inject substrate into an array of preformed plugs without cross-contamination: comparing theory and experiments, Anal. Chem. 79 (2007) 2756-2761.
8. J.-s. Han, Z.-y. Tan, K. Sato, M. Shikida, Three-dimensional interconnect technology on a flexible polyimide film, J. Micromech. Microeng. 14 (2004) 38-48.
9. K. Swinney, D. J. Bornhop, Detection in capillary electrophoresis, Electrophoresis 21 (2000) 1239-1250.
10. M. A. Schwarz, P. C. Hauser, Recent developments in detection methods for microfabricated analytical devices, Lab Chip 1 (2001) 1-6.
11. S. Kulmala, J. Suomi, Current status of modern analytical luminescence methods, Anal. Chim. Acta 500 (2003) 21-69.
12. E. Verpoorte, Chip vision'optics for microchips, Lab Chip 3 (2003) 42N-52N.
13. K. B. Mogensen, H. Klank, J. P. Kutter, Recent developments in detection for microfluidic systems, Electrophoresis 25 (2004) 3498-3512.
14. A. T. Woolley, K. Lao, A. N. Glazer, R. A. Mathies, Capillary electrophoresis chips with integrated electrochemical detection, Anal. Chem. 70 (1998) 684-688.
15. A. Hilmi, J. H. T. Luong, Electrochemical detectors prepared by electroless deposition for microfabricated electrophoresis chips, Anal. Chem. 72 (2000) 4677-4682.
16. A. J. Gawron, R. S. Martin, S. M. Lunte, Fabrication and evaluation of a carbon-based dual-electrode detector for poly (dimethylsiloxane) electrophoresis chips, Electrophoresis 22 (2001) 242-248.
17. N. A. Lacher, S. M. Lunte, R. S. Martin, Development of a microfabricated palladium decoupler/electrochemical detector for microchip capillary electrophoresis using a hybrid glass/poly (dimethylsiloxane) device, Anal. Chem. 76 (2004) 2482-2491.
18. E. E. Krommenhoek, J. G. E. Gardeniers, J. G. Bomer, X. Li, M. Ottens, G. W. K. vanDedem, M. VanLeeuwen, W. M. vanGulik, L. A. M. vanderWielen, J. J. Heijnen, A. vandenBerg, Integrated electrochemical sensor array for on-line monitoring of yeast fermentations, Anal. Chem. (2007).
19. R. M. Guijt, E. Baltussen, G. Van der Steen, R. B. M. Schasfoort, S. Schlautmann, H. A. H. Billiet, J. Frank, G. W. K. Van Dedem, A. Van den Berg, New approaches for fabrication of microfluidic capillary electrophoresis devices with on-chip conductivity detection, Electrophoresis 22 (2001) 235-241.
20. M. Galloway, W. Stryjewski, A. Henry, S. M. Ford, S. Llopis, R. L. McCarley, S. A. Soper, Contact conductivity detection in poly (methyl methacrylate)-based microfluidic devices for analysis of mono-and polyanionic molecules, Anal. Chem. 74 (2002) 2407-2415.
21. J. Lichtenberg, N. F. de Rooij, E. Verpoorte, A microchip electrophoresis system with integrated in-plane electrodes for contactless conductivity detection, Electrophoresis 23 (2002) 3769-3780.
22. J. Tanyanyiwa, S. Leuthardt, P. C. Hauser, Conductimetric and potentiometric detection in conventional and microchip capillary electrophoresis, Electrophoresis 23 (2002) 3659-3666. (Pubitemid 35469547)
23. R. Tantra, A. Manz, Integrated potentiometric detector for use in chip-based flow cells, Anal. Chem. 72 (2000) 2875-2878.
24. R. Ferrigno, J. N. Lee, X. Jiang, G. M. Whitesides, Potentiometric titrations in a poly (dimethylsiloxane)-based microfluidic device, Anal. Chem. 76 (2004) 2273-2280.
25. J. J. van Baar, R. J. Wiegerink, T. S. J. Lammerink, G. J. M. Krijnen, M. Elwenspoek, Micromachined structures for thermal measurements of fluid and flow parameters, J. Micromech. Microeng. 11 (2001) 311-318.
26. J.-s. Han, T. Kadowaki, K. Sato, M. Shikida, Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors, Sens. Actuators A: Phys. A100 (2002) 114-122.
27. J. J. van Baar, W. A. Verweij, M. Dijkstra, R. J. Wiegerink, T. S. J. Lammerink, G. J. M. Krijnen, M. Elwenspoek, Micromachined two-dimensional resistor arrays for determination of gas parameters, in: Digest of Technical Papers, Transducers'03, International Conference on Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, MA, United States, 2003.
28. J.-s. Han, Z.-y. Tan, K. Sato, M. Shikida, Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications, J. Micromech. Microeng. 15 (2005) 282-289.
29. O. Berberig, K. Nottmeyer, J. Mizuno, Y. Kanai, T. Kobayashi, The prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement, Sens. Actuators A: Phys. A66 (1998) 93-98.
30. M. N. Horenstein, J. A. Perreault, T. G. Bifano, Differential capacitive position sensor for planar mems structures with vertical motion, Sens. Actuators A: Phys. A80 (2000) 53-61.
31. L. L. Sohn, O. A. Saleh, G. R. Facer, A. J. Beavis, R. S. Allan, D. A. Notterman, Capacitance cytometry: measuring biological cells one by one, Proc. Natl. Acad. Sci. 97 (2000) 10687-10690.
32. J. Z. Chen, A. A. Darhuber, S. M. Troian, S. Wagner, Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation, Lab Chip 4 (2004) 473-480.
33. R. Kapon, I. Sagiv, J. Shappir, N. Mazorski, G. Ziv, D. Shahar, Z. Reich, Method to sense single-particle motion using a tapered-gap microcapacitor, Appl. Phys. Lett. 84 (2004) 4277-4279.
34. W. Olthuis, W. Streekstra, P. Bergveld, Theoretical and experimental determination of cell constants of planar-interdigitated electrolyte conductivity sensors, Sens. Actuators B: Chem. B24 (1995) 252-256.
35. B. K. Gale, K. D. Caldwell, A. B. Frazier, Electrical conductivity particle detector for use in biological and chemical micro-analysis systems, in: Proceedings of SPIE-The International Society for Optical Engineering, vol. 3515, 1998, pp. 230-241.
36. V. Haguet, D. Martin, L. Marcon, T. Heim, D. Stievenard, C. Olivier, O. El-Mahdi, O. Melnyk, Combined nanogap nanoparticles nanosensor for electrical detection of biomolecular interactions between polypeptides, Appl. Phys. Lett. 84 (2004) 1213-1215.
37. J. Collins, A. P. Lee, Microfluidic flow transducer based on the measurement of electrical admittance, Lab Chip 4 (2004) 7-10.
38. J. D. Beck, L. Shang, M. S. Marcus, R. J. Hamers, Manipulation and real-time electrical detection of individual bacterial cells at electrode junctions: a model for assembly of nanoscale biosystems, Nano Lett. 5 (2005) 777-781.
39. G. Marchand, C. Delattre, R. Campagnolo, P. Pouteau, F. Ginot, Electrical detection of DNA hybridization based on enzymatic accumulation confined in nanodroplets, Anal. Chem. 77 (2005) 5189-5195.
40. T. Thorsen, R. W. Roberts, F. H. Arnold, S. R. Quake, Dynamic pattern formation in a vesicle-generating microfluidic device, Phys. Rev. Lett. 86 (2001) 4163-4166.
41. J. D. Tice, H. Song, A. D. Lyon, R. F. Ismagilov, Formation of droplets and mixing in multiphase microfluidics at low values of the Reynolds and the capillary numbers, Langmuir 19 (2003) 9127-9133.
42. B. Zheng, J. D. Tice, R. F. Ismagilov, Formation of droplets of alternating composition in microfluidic channels and applications to indexing of concentrations in droplet-based assays, Anal. Chem. 76 (2004) 4977-4982.
43. S. A. Khan, A. Guenther, M. A. Schmidt, K. F. Jensen, Microfluidic synthesis of colloidal silica, Langmuir 20 (2004) 8604-8611.
44. N. Srivastava, M. A. Burns, Electronic drop sensing in microfluidic devices: automated operation of a nanoliter viscometer, Lab Chip 6 (2006) 744-751.
45. Y. Mo, Y. Okawa, K. Inoue, K. Natukawa, Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array, Sens. Actuators A: Phys. A100 (2002) 94-101.
46. C. H. Shen, C. Gau, Heat exchanger fabrication with arrays of sensors and heaters with its micro-scale impingement cooling process analysis and measurements, Sens. Actuators A: Phys. A114 (2004) 154-162.
47. J.-J. Park, M. Taya, Design of micro-temperature sensor array with thin film thermocouples, J. Electronic Packaging 127 (2005) 286-289.
48. L. Jiang, W. Man, Y. Zohar, Micromachined polycrystalline thin-film temperature sensors, Meas. Sci. Technol. 10 (1999) 653-664.
49. K.-D. Song, B.-S. Joo, N.-J. Choi, Y.-S. Lee, S.-M. Lee, J.-S. Huh, D.-D. Lee, A micro hot-wire sensors for gas sensing applications, Sens. Actuators B: Chem. B102 (2004) 1-6.
50. S. He, M. M. Mench, S. Tadigadapa, Thin film temperature sensor for real-time measurement of electrolyte temperature in a polymer electrolyte fuel cell, Sens. Actuators A: Phys. A125 (2006) 170-177.
51. W. C. Shin, R. S. Besser, A micromachined thin-film gas flow sensor for micro-chemical reactors, J. Micromech. Microeng. 16 (2006) 731-741.
52. C. Ionescu-Zanetti, J. T. Nevill, D. Di Carlo, K. H. Jeong, L. P. Lee, Nanogap capacitors. Sensitivity to sample permittivity changes, J. Appl. Phys. 99 (2006) 024305/1-124305/5.
53. M. Aslam, C. Gregory, J. V. Hatfield, Polyimide membrane for micro-heated gas sensor array, Sens. Actuators B: Chem. B103 (2004) 153-157.
54. H. R. Chen, C. Gau, B. T. Dai, M. S. Tsai, A monolithic fabrication process for a micro-flow heat transfer channel suspended over an air layer with arrays of micro-sensors and heaters, Sens. Actuators A: Phys. A108 (2003) 81-85.
55. D. N. Pagonis, A. G. Nassiopoulou, G. Kaltsas, Porous silicon membranes over cavity for efficient local thermal isolation in situ thermal sensors, J. Electrochem. Soc. 151 (2004) H174-H179.
56. D. Qin, Y. Xia, G. M. Whitesides, Rapid prototyping of complex structures with feature sizes larger than 20 mm, Adv. Mater. 8 (1996) 917-919.
57. D. A. Skoog, F. J. Holler, T. A. Nieman, Principles of Instrumental Analysis, 5th ed., Saunders College Publishing, Chicago, 1998, pp. 108-110.