Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors

Sensors and Actuators, A: Physical

Volumn 100, Issue 1, 2002, Pages 114-122

  Ji song, Han ^a   Kadowaki, T ^a   Sato, K ^a   Shikida, M ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Microfabrication; Micromachining; Thermal insulation; Thermal type fingerprint sensor

Indexed keywords

ELECTRIC WIRING; ETCHING; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; THERMAL INSULATION;

FINGERPRINT SENSORS; HEATER BRIDGE; INSULATION CAVITIES; MICROHEATER ELEMENTS; THERMAL CAPACITY; THERMAL ISOLATION STRUCTURE;

MICROSENSORS;

EID: 0037103983     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00136-X     Document Type: Article

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