Differential capacitive position sensor for planar MEMS structures with vertical motion

Sensors and Actuators, A: Physical

Volumn 80, Issue 1, 2000, Pages 53-61

  Horenstein, Mark N ^a   Perreault, Julie A ^a   Bifano, Thomas G ^b  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON;

CAPACITIVE SENSORS;

MICROSENSORS;

EID: 0033882350     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00251-4     Document Type: Article

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