Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications

Journal of Micromechanics and Microengineering

Volumn 15, Issue 2, 2005, Pages 282-289

  Han, Ji Song ^a   Tan, Zhi Yong ^a   Sato, K ^a   Shikida, M ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; MICROSENSORS; OPTICAL SENSORS; POLYIMIDES; RESISTORS; SPECIFIC HEAT; THERMOANALYSIS;

COPPER FILMS; FINGERPRINTS; POLYIMIDE FILMS; THERMAL CHARACTERIZATION;

PATTERN RECOGNITION;

EID: 14244269672     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/2/006     Document Type: Article

References (12)

1. Ross A and Jain A 2003 Information fusion in biometrics Pattern Recog. Lett. 24 2115-25
2. Mainguet J-F, Pegulu M and Harris J B 2000 Fingerprint recognition based on silicon chips Future Gener. Comput. Syst. 16 403-15
3. Xia X and O'Gorman L 2003 Innovations in fingerprint capture devices Pattern Recog. 36 361-9
4. Rey P, Charvet P, Delaye M T and Abou hassan S 1997 Leti-cea/Grenoble, a high density capacitive pressure sensor array for fingerprint sensor application Proc. Transducers'97 (Chicago, USA, 1997) pp 1453-6
5. De Souza R J and Wise K D 1997 A very high density bulk micromachined capacitive tactile imager Proc. Transducers'97 (Chicago, USA, 1997) pp 1473-6
6. J-W Lee, D-J Min, Kim J and Kim W 1999 A 600-dip capacitive fingerprint sensor chip and image-synthesis technique IEEE J. Solid-State Circuits 34 469-75
7. Jung S, Hierold C, Scheiter T, von Basse P W, Thewes R, Goser K and Weber W 1999 Intelligent CMOS fingerprint sensors Proc. Transducers'99, 10th Int. Conf. on Solid-State Sensors and Actuators (Sendai, Japan, 7-10 June 1999) pp 966-9
8. Morimura H, Shigematsu S and Machida K 2000 A novel sensor cell architecture and sensing circuit scheme for capacitive fingerprint sensors IEEE J. Solid State Circuits 35 724-31
9. Roberts J 2000 Silicon fingerprint sensors Biometric Technol. Today 8 8-10
10. Sato K, Kadowaki T, Han J-S and Shikida M 1999 Fingerprint sensor with an arrayed microheater elements Proc. Transducers'99, The 10th Int. Conf. on Solid-State Sensors and Actuators (Sendai, Japan, 7-10 June 1999) pp 1874-5
11. Han J-S, Kadowaki T, Sato K and Shikida M 2002 Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors Sensors Actuators A 100 114-222
12. Han J-S, Tan Z-Y, Sato K and Shikida M 2004 Three-dimensional interconnect technology on flexible polyimide film J. Micromech. Microeng. 14 38-48