SCOPUS 정보 검색 플랫폼

Volumn 151, Issue 8, 2004, Pages

Porous silicon membranes over cavity for efficient local thermal isolation in Si thermal sensors

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZATION; CAVITY FORMATION; ELECTRICAL ISOLATION; THERMAL ISOLATION;

COMPUTER SIMULATION; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTROLYTIC POLISHING; POROUS MATERIALS; SENSORS; SILICON; SUBSTRATES;

THIN FILMS;

EID: 4344590744 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1764571 Document Type: Article

Times cited : (18)

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