Micromachined structures for thermal measurements of fluid and flow parameters

Journal of Micromechanics and Microengineering

Volumn 11, Issue 4, 2001, Pages 311-318

  Van Baar, J J ^a   Wiegerink, R J ^a   Lammerink, T S J ^a   Krijnen, G J M ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROMACHINING; PRESSURE EFFECTS; SENSORS; SPECIFIC HEAT; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY; VISCOSITY;

MICROMACHINED STRUCTURES;

FLOW MEASUREMENT;

EID: 0035395456     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/4/304     Document Type: Article

References (16)

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9. Terracing of (100) Si with one mask and one etching step using misaligned v-grooves
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