Micromachined two dimensional resistor arrays for determination of gas parameters

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1606-1609

  Van Baar, J J ^a   Verweij, W A ^a   Dijkstra, M ^a   Wiegerink, R J ^a   Lammerink, T S J ^a   Krijnen, G J M ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Conductivity measurement; Electrical resistance measurement; Fluid flow measurement; Resistors; Sensor arrays; Temperature distribution; Temperature measurement; Temperature sensors; Thermal conductivity; Velocity measurement

Indexed keywords

ACTUATORS; CHANNEL FLOW; DIFFUSION IN LIQUIDS; ELECTRIC VARIABLES MEASUREMENT; FLOW MEASUREMENT; FLOW OF FLUIDS; FLOW VELOCITY; HEAT RESISTANCE; MICROSYSTEMS; RESISTORS; SENSOR ARRAYS; TEMPERATURE; TEMPERATURE DISTRIBUTION; TEMPERATURE MEASUREMENT; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY OF LIQUIDS; TRANSDUCERS; VELOCITY MEASUREMENT;

CONDUCTIVITY MEASUREMENTS; ELECTRICAL RESISTANCE MEASUREMENT; FLUID PARAMETERS; INHERENT COMPENSATION; RESISTIVE SENSOR; RESISTOR ARRAYS; SIMULTANEOUS MEASUREMENT; TEMPERATURE COEFFICIENT OF RESISTANCE;

SOLID-STATE SENSORS;

EID: 84944734832     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217088     Document Type: Conference Paper

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