The Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow-velocity measurement

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 93-98

  Berberig, Oliver ^a   Nottmeyer, Kay ^a   Mizuno, Jun ^b   Kanai, Yoshitaka ^b   Kobayashi, Takashi ^b  

^a ZEXEL Corporation   (Germany)

^b ZEXEL Corporation   (Japan)

Author keywords

Capacitive sensors; Flow velocity; Prandtl tube

Indexed keywords

CAPACITORS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FLOW CONTROL; FLOW MEASUREMENT; VELOCITY MEASUREMENT; WIND TUNNELS;

PRANDTL MICRO FLOW SENSORS (PMFS); SILICON DIAPHRAGM CAPACITIVE SENSORS;

SILICON SENSORS;

EID: 0032049424     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01733-0     Document Type: Article

References (4)

1. L. Prandtl, Führer durch die Strömungslehre, Friedr. Viehweg and Sohn. Braunschweig, 1942, p. 52.
2. W. Bohl, Technische Strömungslehre, Vogel Buchverlag, Würzburg, 1991, pp. 83-84.
3. W. Griffel, Plate Formulas, F. Unglar, New York, 1968, p. 99.
4. D.R. Harrison and J. Dimeff, A diode-quad bridge circuit for use with capacitance transducers, Rev. Sci. Instrum., 44 (1973) 1468-1471.