Design of micro-temperature sensor array with thin film thermocouples

Journal of Electronic Packaging

Volumn 127, Issue 3, 2005, Pages 286-289

  Park, Jong Jin ^a   Taya, Minoru ^a  

^a University of Washington   (United States)

Author keywords

Seebeck Coefficient; Temperature Sensors; Thermocouple Arrays; Thin Film

Indexed keywords

ALUMINUM NITRIDE; COMPUTER SIMULATION; ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; HEAT CONDUCTION; SENSORS; SILICON; SUBSTRATES; THERMOANALYSIS; THERMOCOUPLES;

SEEBECK COEFFICIENT; TEMPERATURE SENSORS; THERMOCOUPLE ARRAYS; THIN FILM THERMOCOUPLES (TFTC);

THIN FILMS;

EID: 26844509336     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1997157     Document Type: Article

References (9)

1. Shi, L., Kwon, O., Miner, A., and Majumdar, A., 2001, "Design and Batch Fabrication of Probes for Sub-100nm Scanning Thermal Microscopy," J. Microelectromech. Syst., 10(3), pp. 370-378.
2. Shi, L., Plyasunoy, S., Bachtold, A., McEuen, P., and Majumdar, A., 2000, "Scanning Thermal Microscopy of Carbon Nanotubes Using Batch-Fabricated Probes," Appl. Phys. Lett. 77(26), pp. p4295-4297.
3. Gualous, H., Louahlia-Gualous, H., and Bocus, S., 2001, "Realization and Thermal Characterization of Thin-Film Optothermal Microsensor," Eur. Phys. J.: Appl. Phys. 14(2), pp. 147-152.
4. Bocus, S., Gualous, H., and Prenel, J., 2000, "A Gold-Palladium Thin-Film Microsensor Array for Thermal Imaging of Laser Beam Waists," Sens. Actuators, A, A84(3), pp. 303-309.
5. Bhatt, H., Vedula, R., Desu, S., and Fralick, G., 1999, "Thin Film TiC/TaC Thermocouples," Thin Solid Films, 342(1-2), pp. 214-220.
6. Kreider, K., and DiMeo, F., 1998, "Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers," Sens. Actuators, A, A69(1), pp. 46-52.
7. Kreider, K., and Gillen, G., 2000, "High Temperature Materials for Thin-Film Thermocouples on Silicon Wafers," Thin Solid Films, 376(1-2), pp. 32-37.
8. Schepis, R., 1992, "Thermopower of Thin Iron Films," J. Magn. Magn. Mater., 104-107, p. 1757.
9. Schepis, R., Matienzo, L., Emmi, F., Unertl, W., and Schroder, K., 1994, "Influence of Deposition Rates and Thickness on the Electrical Resistivity and Thermoelectric Power of Thin Iron Films," Thin Solid Films, 251, pp. 99-102.