Heat exchanger fabrication with arrays of sensors and heaters with its micro-scale impingement cooling process analysis and measurements

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 154-162

  Shen, C H ^a   Gau, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

MEMS fabrication; Micro heat exchanger; Micro impingement cooling heat transfer; Micro scale impinging jet

Indexed keywords

COOLING; HEAT CONDUCTION; HEAT EXCHANGERS; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; NOZZLES; POLYSILICON; TEMPERATURE DISTRIBUTION;

MEMS FABRICATION; MICRO-HEAT EXCHANGER; MICRO-SCALE IMPINGING JETS; THERMAL CHIPS;

SENSORS;

EID: 4344702151     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.032     Document Type: Article

References (8)

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7. C. Gau, C.H. Shen, Micro free jet phenomenon, J. Fluid Mech., submitted for publication.
8. C.H. Shen, Thermal chip fabrication with arrays of sensors and heaters with analysis and measurements of micro-scale impingement cooling flow and heat transfer, PhD Thesis, National Cheng Kung University, Tainan, Taiwan, ROC, 2003.