SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 100, Issue 1, 2010, Pages 181-191

Large-format fabrication by two-photon polymerization in SU-8

(3) Liu, Yihong a Nolte, David D a Pyrak Nolte, Laura J a

a PURDUE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL LOADING; EXPOSURE CURVE; FEMTO-SECOND LASER; LARGE-FORMAT; LASER WRITING; MICRO-POROUS STRUCTURE; PULSE ENERGIES; SCIENCE AND ENGINEERING; TWO PHOTON POLYMERIZATION;

MICROPOROSITY; PHOTONS; POLYMERIZATION; PULSED LASER APPLICATIONS;

THERMAL EXPANSION;

EID: 77954088524 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-5735-8 Document Type: Article

Times cited : (23)

References (42)

1
- 1642415418
- 10.1063/1.1754182 1965ApPhL.6.93P
- P. Yon-Han P.M. Rentzepis 1965 Appl. Phys. Lett. 6 93 95 10.1063/1.1754182 1965ApPhL...6...93P
- (1965) Appl. Phys. Lett. , vol.6 , pp. 93-95
- Yon-Han, P.¹ Rentzepis, P.M.²

2
- 37049186161
- 10.1126/science.245.4920.843 1989Sci.245.843P
- D.A. Parthenopoulos P.M. Rentzepis 1989 Science 245 843 845 10.1126/science.245.4920.843 1989Sci...245..843P
- (1989) Science , vol.245 , pp. 843-845
- Parthenopoulos, D.A.¹ Rentzepis, P.M.²

3
- 0346867966
- 10.1364/OL.16.001780 1991OptL.16.1780S
- J.H. Strickler W.W. Webb 1991 Opt. Lett. 16 1780 1782 10.1364/OL.16.001780 1991OptL...16.1780S
- (1991) Opt. Lett. , vol.16 , pp. 1780-1782
- Strickler, J.H.¹ Webb, W.W.²

4
- 0142090018
- 10.1063/1.1610253 2003ApPhL.83.2091K
- K. Kaneko H.B. Sun X.M. Duan S. Kawata 2003 Appl. Phys. Lett. 83 2091 2093 10.1063/1.1610253 2003ApPhL..83.2091K
- (2003) Appl. Phys. Lett. , vol.83 , pp. 2091-2093
- Kaneko, K.¹ Sun, H.B.² Duan, X.M.³ Kawata, S.⁴

5
- 9144247150
- 10.1364/OPEX.12.005221 2004OExpr.12.5221S
- J. Serbin A. Ovsianikov B. Chichkov 2004 Opt. Express 12 5221 5228 10.1364/OPEX.12.005221 2004OExpr..12.5221S
- (2004) Opt. Express , vol.12 , pp. 5221-5228
- Serbin, J.¹ Ovsianikov, A.² Chichkov, B.³

6
- 43049141486
- Three dimensional silicon-air photonic crystals with controlled defects using interference lithography
- DOI 10.1063/1.2919523
- V. Ramanan E. Nelson A. Brzezinski P.V. Braun P. Wiltzius 2008 Appl. Phys. Lett. 92 173304 10.1063/1.2919523 2008ApPhL..92q3304R (Pubitemid 351624942)
- (2008) Applied Physics Letters , vol.92 , Issue.17 , pp. 173304
- Ramanan, V.¹ Nelson, E.² Brzezinski, A.³ Braun, P.V.⁴ Wiltzius, P.⁵

7
- 0030736545
- 10.1364/OL.22.000132 1997OptL.22.132M
- S. Maruo O. Nakamura S. Kawata 1997 Opt. Lett. 22 132 134 10.1364/OL.22.000132 1997OptL...22..132M
- (1997) Opt. Lett. , vol.22 , pp. 132-134
- Maruo, S.¹ Nakamura, O.² Kawata, S.³

8
- 0000496144
- 10.1364/OL.25.001110 2000OptL.25.1110S
- H.-B. Sun T. Kawakami Y. Xu J.-Y. Ye S. Matuso H. Misawa M. Miwa R. Kaneko 2000 Opt. Lett. 25 1110 1112 10.1364/OL.25.001110 2000OptL...25.1110S
- (2000) Opt. Lett. , vol.25 , pp. 1110-1112
- Sun, H.-B.¹ Kawakami, T.² Xu, Y.³ Ye, J.-Y.⁴ Matuso, S.⁵ Misawa, H.⁶ Miwa, M.⁷ Kaneko, R.⁸

9
- 0000990665
- Complex micromachines produced and driven by light
- DOI 10.1063/1.1339258
- P. Galajda P. Ormos 2001 Appl. Phys. Lett. 78 249 251 10.1063/1.1339258 2001ApPhL..78..249G (Pubitemid 33661819)
- (2001) Applied Physics Letters , vol.78 , Issue.2 , pp. 249-251
- Galajda, P.¹ Ormos, P.²

10
- 0037443201
- 10.1016/S0169-4332(02)01358-2
- S. Kawata S. Hong-Bo 2003 Appl. Surf. Sci. 208-209 153 158 10.1016/S0169-4332(02)01358-2
- (2003) Appl. Surf. Sci. , vol.208-209 , pp. 153-158
- Kawata, S.¹ Hong-Bo, S.²

11
- 31144452834
- Micro lens fabrication by means of femtosecond two photon photopolymerization
- DOI 10.1364/OPEX.14.000810
- R. Guo S.Z. Xiao X.M. Zhai J.W. Li A.D. Xia W.H. Huang 2006 Opt. Express 14 810 816 10.1364/OPEX.14.000810 2006OExpr..14..810G (Pubitemid 43133633)
- (2006) Optics Express , vol.14 , Issue.2 , pp. 810-816
- Guo, R.¹ Xiao, S.² Zhai, X.³ Li, J.⁴ Xia, A.⁵ Huang, W.⁶

12
- 33745895618
- Direct single-layered fabrication of 3D concavo-convex patterns in nano-stereolithography
- DOI 10.1007/s00339-006-3633-x
- T.W. Lim S.H. Park D.Y. Yang H.J. Kong K.S. Lee 2006 Appl. Phys. A 84 379 383 10.1007/s00339-006-3633-x 2006ApPhA..84..379L (Pubitemid 44048468)
- (2006) Applied Physics A: Materials Science and Processing , vol.84 , Issue.4 , pp. 379-383
- Lim, T.W.¹ Park, S.H.² Yang, D.Y.³ Kong, H.J.⁴ Lee, K.S.⁵

13
- 0033545112
- 10.1063/1.123283 1999ApPhL.74.170J
- M.P. Joshi H.E. Pudavar J. Swiatkiewicz P.N. Prasad B.A. Reianhardt 1999 Appl. Phys. Lett. 74 170 172 10.1063/1.123283 1999ApPhL..74..170J
- (1999) Appl. Phys. Lett. , vol.74 , pp. 170-172
- Joshi, M.P.¹ Pudavar, H.E.² Swiatkiewicz, J.³ Prasad, P.N.⁴ Reianhardt, B.A.⁵

14
- 33646587393
- Optical components based on two-photon absorption process in functionalized polymers
- DOI 10.1016/j.apsusc.2005.07.126, PII S0169433205014303
- S. Klein A. Barsella G. Taupier V. Stortz A. Fort K.D. Dorkenoo 2006 Appl. Surf. Sci. 252 4919 4922 10.1016/j.apsusc.2005.07.126 2006ApSS..252.4919K (Pubitemid 43729247)
- (2006) Applied Surface Science , vol.252 , Issue.13 SPEC. ISS. , pp. 4919-4922
- Klein, S.¹ Barsella, A.² Taupier, G.³ Stortz, V.⁴ Fort, A.⁵ Dorkenoo, K.D.⁶

15
- 0035899361
- Finer features for functional microdevices
- DOI 10.1038/35089130
- S. Kawata H.B. Sun T. Tanaka K. Takada 2001 Nature 412 697 698 10.1038/35089130 2001Natur.412..697K (Pubitemid 32771982)
- (2001) Nature , vol.412 , Issue.6848 , pp. 697-698
- Kawata, S.¹ Sun, H.-B.² Tanaka, T.³ Takada, K.⁴

16
- 34249041535
- 10.1142/S021886350700355X 2007JNOPM.16.59L
- K.S. Lee R.H. Kim P. Prabhakaran 2007 J. Nonlinear Opt. Phys. Mater. 16 59 73 10.1142/S021886350700355X 2007JNOPM..16...59L
- (2007) J. Nonlinear Opt. Phys. Mater. , vol.16 , pp. 59-73
- Lee, K.S.¹ Kim, R.H.² Prabhakaran, P.³

17
- 33947381348
- 65 nm feature sizes using visible wavelength 3-D multiphoton lithography
- DOI 10.1364/OE.15.003426
- W. Haske V.W. Chen J.M. Hales W.T. Dong S. Barlow S.R. Marder J.W. Perry 2007 Opt. Express 15 3426 3436 10.1364/OE.15.003426 2007OExpr..15.3426H (Pubitemid 46457205)
- (2007) Optics Express , vol.15 , Issue.6 , pp. 3426-3436
- Haske, W.¹ Chen, V.W.² Hales, J.M.³ Dong, W.⁴ Barlow, S.⁵ Marder, S.R.⁶ Perry, J.W.⁷

18
- 31144473423
- Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization
- DOI 10.1364/OPEX.14.000800
- F. Formanek N. Takeyasu T. Tanaka K. Chiyoda A. Ishikawa S. Kawata 2006 Opt. Express 14 800 809 10.1364/OPEX.14.000800 2006OExpr..14..800F (Pubitemid 43133632)
- (2006) Optics Express , vol.14 , Issue.2 , pp. 800-809
- Formanek, F.¹ Takeyasu, N.² Tanaka, T.³ Chiyoda, K.⁴ Ishikawa, A.⁵ Kawata, S.⁶

19
- 48349138246
- 10.1007/s00339-008-4610-3 2008ApPhA.92.541L
- T.W. Lim Y. Son D.Y. Yang H.J. Kong K.S. Lee S.H. Park 2008 Appl. Phys. A 92 541 545 10.1007/s00339-008-4610-3 2008ApPhA..92..541L
- (2008) Appl. Phys. A , vol.92 , pp. 541-545
- Lim, T.W.¹ Son, Y.² Yang, D.Y.³ Kong, H.J.⁴ Lee, K.S.⁵ Park, S.H.⁶

20
- 0035255415
- 10.1002/1097-4636(200102)54:2<162::AID-JBM2>3.0.CO;2-3
- W. Linhart F. Peters W. Lehmann K. Schwarz A.F. Schilling M. Amling J.M. Rueger M. Epple 2001 J. Biomed. Mater. Res. 54 162 171 10.1002/1097-4636(200102) 54:2<162::AID-JBM2>3.0.CO;2-3
- (2001) J. Biomed. Mater. Res. , vol.54 , pp. 162-171
- Linhart, W.¹ Peters, F.² Lehmann, W.³ Schwarz, K.⁴ Schilling, A.F.⁵ Amling, M.⁶ Rueger, J.M.⁷ Epple, M.⁸

21
- 0001409219
- Chem
- B.B. Lakshmi C.J. Patrissi C.R. Martin 1997 Chem Mat. 9 2544 2550
- (1997) Mat. , vol.9 , pp. 2544-2550
- Lakshmi, B.B.¹ Patrissi, C.J.² Martin, C.R.³

22
- 12544254719
- 10.1029/2004WR003363
- S.C. Jose M.A. Rahman O.A. Cirpka 2004 Water Resour. Res. 40 13 10.1029/2004WR003363
- (2004) Water Resour. Res. , vol.40 , pp. 13
- Jose, S.C.¹ Rahman, M.A.² Cirpka, O.A.³

23
- 27744509818
- Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique
- DOI 10.1364/OPEX.13.009605
- N.D. Lai W.P. Liang J.H. Lin C.C. Hsu C.H. Lin 2005 Opt. Express 13 9605 9611 10.1364/OPEX.13.009605 2005OExpr..13.9605L (Pubitemid 41611995)
- (2005) Optics Express , vol.13 , Issue.23 , pp. 9605-9611
- Lai, N.D.¹ Liang, W.P.² Lin, J.H.³ Hsu, C.C.⁴ Lin, C.H.⁵

24
- 77954089062
- SPIE Santa Clara
- N.C. LaBianca, J.D. Gelorme, in Advances in Resist Technology and Processing XII (SPIE, Santa Clara, 1995), p. 846
- (1995) Advances in Resist Technology and Processing XII , pp. 846
- Labianca, N.C.¹ Gelorme, J.D.²

25
- 0037231215
- 10.1088/0960-1317/13/1/312
- R. Feng R.J. Farris 2003 J Micromech. Microeng. 13 80 88 10.1088/0960-1317/13/1/312
- (2003) J Micromech. Microeng. , vol.13 , pp. 80-88
- Feng, R.¹ Farris, R.J.²

26
- 0030646206
- 10.1147/rd.411.0081
- J.M. Shaw J.D. Gelorme 1997 IBM J. Res. Dev. 41 81 10.1147/rd.411.0081
- (1997) IBM J. Res. Dev. , vol.41 , pp. 81
- Shaw, J.M.¹ Gelorme, J.D.²

27
- 6344267073
- 2004ApPhA.79.2027L
- C.H. Lee T.W. Chang K.L. Lee J.Y. Lin J. Wang 2004 Appl. Phys. A 79 2027 2031 2004ApPhA..79.2027L
- (2004) Appl. Phys. A , vol.79 , pp. 2027-2031
- Lee, C.H.¹ Chang, T.W.² Lee, K.L.³ Lin, J.Y.⁴ Wang, J.⁵

28
- 0038798179
- 10.1116/1.588297
- K.Y. Lee N. LaBianca S.A. Rishton S. Zolgharnain J.D. Gelorme J. Shaw T.H.P. Chang 1995 J. Vac. Sci. Technol. B 13 3012 3016 10.1116/1.588297
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 3012-3016
- Lee, K.Y.¹ Labianca, N.² Rishton, S.A.³ Zolgharnain, S.⁴ Gelorme, J.D.⁵ Shaw, J.⁶ Chang, T.H.P.⁷

29
- 20444457021
- Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography
- DOI 10.1063/1.1856214, 054907
- W.H. Teh U. Durig U. Drechsler C.G. Smith H.J. Guntherodt 2005 J. Appl. Phys. 97 54907 54901 10.1063/1.1856214 2005JAP....97E4907T (Pubitemid 40818274)
- (2005) Journal of Applied Physics , vol.97 , Issue.5 , pp. 1-11
- Teh, W.H.¹ Durig, U.² Drechsler, U.³ Smith, C.G.⁴ Guntherodt, H.-J.⁵

30
- 0031221057
- 10.1088/0960-1317/7/3/010 1997JMiMi.7.121L
- H. Lorenz M. Despont N. Fahrni N. LaBianca P. Renaud P. Vettiger 1997 J. Micromech. Microeng. 7 121 124 10.1088/0960-1317/7/3/010 1997JMiMi...7..121L
- (1997) J. Micromech. Microeng. , vol.7 , pp. 121-124
- Lorenz, H.¹ Despont, M.² Fahrni, N.³ Labianca, N.⁴ Renaud, P.⁵ Vettiger, P.⁶

31
- 79956057132
- Near-field two-photon nanolithography using an apertureless optical probe
- DOI 10.1063/1.1519329
- X.B. Yin N. Fang X. Zhang I.B. Martini B.J. Schwartz 2002 Appl. Phys. Lett. 81 3663 3665 10.1063/1.1519329 2002ApPhL..81.3663Y (Pubitemid 35427985)
- (2002) Applied Physics Letters , vol.81 , Issue.19 , pp. 3663
- Yin, X.¹ Fang, N.² Zhang, X.³ Martini, I.B.⁴ Schwartz, B.J.⁵

32
- 30744459090
- Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm
- DOI 10.1063/1.2164390, 024107
- M. Gaudet J.-C. Camart L. Buchaillot S. Arscott 2006 Appl. Phys. Lett. 88 024107 10.1063/1.2164390 2006ApPhL..88b4107G (Pubitemid 43100165)
- (2006) Applied Physics Letters , vol.88 , Issue.2 , pp. 1-3
- Gaudet, M.¹ Camart, J.-C.² Buchaillot, L.³ Arscott, S.⁴

33
- 1542740305
- Elsevier Strasbourg
- T. Kondo, K. Yamasaki, S. Juodkazis, S. Matsuo, V. Mizeikis, H. Misawa, in Three-Dimensional Microfabrication by Femtosecond Pulses in Dielectrics (Elsevier, Strasbourg, 2004), pp. 550-556
- (2004) Three-Dimensional Microfabrication by Femtosecond Pulses in Dielectrics , pp. 550-556
- Kondo, T.¹ Yamasaki, K.² Juodkazis, S.³ Matsuo, S.⁴ Mizeikis, V.⁵ Misawa, H.⁶

34
- 0038631871
- 10.1109/JLT.2003.809564 2003JLwT.21.624S
- S. Hong-Bo S. Kawata 2003 J. Lightwave Technol. 21 624 633 10.1109/JLT.2003.809564 2003JLwT...21..624S
- (2003) J. Lightwave Technol. , vol.21 , pp. 624-633
- Hong-Bo, S.¹ Kawata, S.²

35
- 77954088378
- J.T. Cheng, L.J. Pyrak-Nolte, D.D. Nolte, N.J. Giordano, Geophys. Res. Lett. 31 (2004)
- (2004) Geophys. Res. Lett. , vol.131
- Cheng, J.T.¹ Pyrak-Nolte, L.J.² Nolte, D.D.³ Giordano, N.J.⁴

36
- 77954086500
- D.Q. Chen, L.J. Pyrak-Nolte, J. Griffin, N.J. Giordano, Water Resour. Res. 43 (2007)
- (2007) Water Resour. Res. , vol.43
- Chen, D.Q.¹ Pyrak-Nolte, L.J.² Griffin, J.³ Giordano, N.J.⁴

37
- 77954083666
- L.J. Pyrak-Nolte, D.D. Nolte, D.Q. Chen, N.J. Giordano, Water Resour. Res. 44 (2008)
- (2008) Water Resour. Res. , vol.44
- Pyrak-Nolte, L.J.¹ Nolte, D.D.² Chen, D.Q.³ Giordano, N.J.⁴

38
- 77954083393
- V.J. Niasar, S.M. Hassanizadeh, L.J. Pyrak-Nolte, C. Berentsen, Water Resour. Res. 45 (2009)
- (2009) Water Resour. Res. , vol.45
- Niasar, V.J.¹ Hassanizadeh, S.M.² Pyrak-Nolte, L.J.³ Berentsen, C.⁴

39
- 0038805251
- 10.1364/OL.28.000301 2003OptL.28.301S
- J. Serbin A. Egbert A. Ostendorf B.N. Chichkov R. Houbertz G. Domann J. Schulz C. Cronauer L. Frohlich M. Popall 2003 Opt. Lett. 28 301 303 10.1364/OL.28.000301 2003OptL...28..301S
- (2003) Opt. Lett. , vol.28 , pp. 301-303
- Serbin, J.¹ Egbert, A.² Ostendorf, A.³ Chichkov, B.N.⁴ Houbertz, R.⁵ Domann, G.⁶ Schulz, J.⁷ Cronauer, C.⁸ Frohlich, L.⁹ Popall, M.¹⁰

40
- 18744370446
- Two-photon lithography of nanorods in SU-8 photoresist
- DOI 10.1088/0957-4484/16/6/039, PII S0957448405892578
- S. Juodkazis V. Mizeikis K.K. Seet M. Miwa H. Misawa 2005 Nanotechnology 16 846 849 10.1088/0957-4484/16/6/039 2005Nanot..16..846J (Pubitemid 40666593)
- (2005) Nanotechnology , vol.16 , Issue.6 , pp. 846-849
- Juodkazis, S.¹ Mizeikis, V.² Seet, K.K.³ Miwa, M.⁴ Misawa, H.⁵

41
- 77954086983
- IEEE Baltimore
- L. Yihong, L.J. Pyrak-Nolte, D. Nolte, in Toward 3D Microfluidic Structures Fabricated with Two-Photon Laser Machining (IEEE, Baltimore, 2007), pp. 2261-2262
- (2007) Toward 3D Microfluidic Structures Fabricated with Two-Photon Laser Machining , pp. 2261-2262
- Yihong, L.¹ Pyrak-Nolte, L.J.² Nolte, D.³

42
- 0003513999
- McGraw-Hill New York
- S.P. Timoshenko, J.M. Gere, Theory of Elastic Stability (McGraw-Hill, New York, 1961)
- (1961) Theory of Elastic Stability
- Timoshenko, S.P.¹ Gere, J.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.