65 nm feature sizes using visible wavelength 3-D multiphoton lithography

Optics Express

Volumn 15, Issue 6, 2007, Pages 3426-3436

  Haske, Wojciech ^a   Chen, Vincent W ^a   Hales, Joel M ^a   Dong, Wenting ^a   Barlow, Stephen ^a   Marder, Seth R ^a   Perry, Joseph W ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMOPHORES; CRYSTAL STRUCTURE; DOSIMETRY; LIGHT ABSORPTION; LITHOGRAPHY;

LINE WIDTHS; NEAR-INFRARED SPECTRAL REGION; PHOTOINDUCED POLYMERIZATION;

ULTRASHORT PULSES;

EID: 33947381348     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.003426     Document Type: Article

References (19)

1. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51-54 (1999).
2. W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, S. R. Marder, "An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication," Science 296, 1106-1109 (2002).
3. J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, M. Popall, "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics," Opt. Lett. 28, 301-303 (2003).
4. F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, J. W. Perry, "Laser and Electron-Beam Induced Growth of Nanoparticles for 2D and 3D Metal Patterning," Adv. Mater. 14, 194-198 (2002).
5. M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, J. L. Bredas, "Structure-Property Relationships for Two-Photon Absorbing Chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
6. S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657-668 (2001).
7. M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444-447 (2004).
8. P. Galajda, and P. Ormos, "Complex micromachines produced and driven by light," Appl. Phys. Lett. 78, 249-251 (2001).
9. J. D. Pitts, P. J. Campagnola, G. A. Epling, S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
10. S. Kawata, H.-B. Sun, T. Tanaka, K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001).
11. K. Takada, H.-B. Sun, S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122-071121 (2005).
12. K. Takada, H.-B. Sun, S. Kawata, "The study on spatial resolution in two-photon induced polymerization," Proc. SPIE 6110, 61100A-1-61100A-7 (2006).
13. S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
14. M. Straub, and M. Gu, "Near-infrared photonic crystals with higher-order bandgaps generated by two-photon photopolymerization," Opt. Lett. 27, 1824-1826 (2002).
15. G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," C. R. Chimie 8, 1308-1316 (2005).
16. M. Rumi, School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, Georgia 30332-0400 (unpublished results, 2006).
17. A. S. Kewitsch, A. Yariv, "Self-focusing and self-trapping of optical beams upon photopolymerization," Opt. Lett. 21, 24-26 (1996).
18. S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).
19. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).