Two-photon photopolymerization as a tool for making micro-devices

Applied Surface Science

Volumn 208-209, Issue 1, 2003, Pages 153-158

  Kawata, Satoshi ^a,c   Sun, Hong Bo ^a,b  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Laser chemistry applications; Laser machining; Laser materials processing applications; Micro electromechanical devices; Micro machining

Indexed keywords

FABRICATION; IMAGING TECHNIQUES; LASER CHEMISTRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOPOLYMERIZATION; RESINS; ATOMIC FORCE MICROSCOPY; LASER APPLICATIONS; LIGHT ABSORPTION; OPTICAL MICROSCOPY; PHOTONS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

TWO-PHOTON ABSORPTION (TPA); PHOTON ABSORPTION;

PHOTONS; PHOTOPOLYMERIZATION;

EID: 0037443201     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01358-2     Document Type: Conference Paper

References (10)

1. Kaiser W., Garrett C.G.B. Phys. Rev. Lett. 7:1961;229.
2. R.R. Shen, Principles of Nonlinear Optics, Wiley, Chichester, 1984.
3. M. Allmen, A. Blatter, Laser-Beam Interactions with Materials, second ed., Springer, Berlin, 1995.
4. Maruo S., Nakamura O., Kawata S. Opt. Lett. 22:1997;132.
5. Sun H.-B., Matsuo S., Misawa H. Appl. Phys. Lett. 74:1999;786.
6. M. Born, E. Wolf, Principles of Optics, seventh ed., Cambridge University Press, Cambridge, 1999, p. 484.
7. Kawata S., Sun H.-B., Tanaka T., Takada K. Nature. 412:2001;697.
8. Tanaka T., Sun H.-B., Kawata S. Appl. Phys. Lett. 80:2002;312.
9. Sun H.-B., Tanaka T., Kawata S. Appl. Phys. Lett. 80:2002;3673.
10. Sun H.-B., Tanaka T., Takada K., Kawata S. Appl. Phys. Lett. 79:2001;1411.