Two-photon laser precision microfabrication and its applications to micro - Nano devices and systems

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 624-633

  Sun, Hong Bo ^a   Kawata, Satoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Laser chemistry applications; Laser machining; Laser materials processing applications; Microelectromechanical devices; Micromachining; Nonlinear optics; Optical polymers; Photolithography

Indexed keywords

DIFFRACTION; FABRICATION; LASER CHEMISTRY; LIGHT ABSORPTION; MICROMACHINING; NONLINEAR OPTICS; PHOTOLITHOGRAPHY; PHOTOPOLYMERIZATION;

TWO-PHOTON ABSORPTION (TPA);

PHOTONS;

EID: 0038631871     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.809564     Document Type: Conference Paper

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