Three-dimensional microfabrication by femtosecond pulses in dielectrics

Thin Solid Films

Volumn 453-454, Issue , 2004, Pages 550-556

  Kondo, Toshiaki ^a,b   Yamasaki, Kazuhiko ^a,b   Juodkazis, Saulius ^a,b   Matsuo, Shigeki ^a,b   Mizeikis, Vygantas ^a,b   Misawa, Hiroaki ^a,b,c  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Dielectric breakdown; Femtosecond laser microfabrication; Micro fabrication; Nano fabrication; Polymers; Polymethylmethacrylate (PMMA)

Indexed keywords

COMPUTER SIMULATION; FUNCTIONS; HOLOGRAPHY; LASER PULSES; LENSES; MATHEMATICAL MODELS; PHOTORESISTS; POLYMETHYL METHACRYLATES; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

DIELECTRIC BREAKDOWN; FEMTOSECOND LASER MICROFABRICATION; MICRO-FABRICATION; NANO-FABRICATION;

DIELECTRIC MATERIALS;

EID: 1542740305     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.180     Document Type: Conference Paper

References (18)

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