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Volumn 12, Issue 26, 2010, Pages 7171-7183

Kinetics of Ge diffusion, desorption and pit formation dynamics during annealing of Si0.8Ge0.2/Si(001) virtual substrates

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EID: 77953947779     PISSN: 14639076     EISSN: None     Source Type: Journal    
DOI: 10.1039/b927274g     Document Type: Article
Times cited : (17)

References (34)
  • 16
    • 0035418983 scopus 로고    scopus 로고
    • Thermo Fisher Scientific Avantage software online help manual
    • M. P. Seah Surf. Interface Anal. 2001 31 721 723
    • (2001) Surf. Interface Anal. , vol.31 , pp. 721-723
    • Seah, M.P.1
  • 32
    • 0003177074 scopus 로고    scopus 로고
    • The AFM tip has a pyramid shape with the following dimensions. Its tip height is ∼10-15 μm and the radius of curvature of the tip is less than 8 nm. This is far smaller than the holes' mean diameter which we have measured to be ∼100 nm at 620 °C. It can be seen be seen from the line profiles that the facets have different slopes. The observation of inverted pyramid structure is unlikely to be caused by the tip radius effect. Furthermore, the "V" shape profile of a hole is also observed under cross-section TEM investigation
    • C. Tetelin X. Wallart D. Stievenard J. P. Nys D. J. Gravesteijn J. Vac. Sci. Technol., B 1998 16 137 141
    • (1998) J. Vac. Sci. Technol., B , vol.16 , pp. 137-141
    • Tetelin, C.1    Wallart, X.2    Stievenard, D.3    Nys, J.P.4    Gravesteijn, D.J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.