Formation of one-dimensional surface grooves from pit instabilities in annealed SiGe/Si(100) epitaxial films

Applied Physics Letters

Volumn 85, Issue 15, 2004, Pages 3253-3255

  Gray, J L ^a   Hull, R ^a   Flora, J A ^b  

^a University of Virginia   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC NANOWIRES; HETEROINTERFACES; LAUE CIRCLE; SURFACE PITS;

ANISOTROPY; ANNEALING; ASPECT RATIO; EPITAXIAL GROWTH; KINETIC THEORY; MOLECULAR BEAMS; NANOSTRUCTURED MATERIALS; NUCLEATION; SELF ASSEMBLY; SILICON COMPOUNDS;

THIN FILMS;

EID: 8644229364     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1801151     Document Type: Article

References (23)

1. R. J. Asaro and W. A. Tiller, Metall. Trans. 3, 1789 (1972).
2. D. J. Srolovitz, Acta Metall. 37, 621 (1989).
3. J. E. Guyer and P. W. Vorhees, Phys. Rev. B 54, 11710 (1996).
4. Y.-W. Mo, D. E. Savage, B. S. Swartzentruber, and M. G. Lagally, Phys. Rev. Lett. 65, 1020 (1990).
5. M. Tomitori, K. Watanabe, M. Kobayashi, and O. Nishikawa, Appl. Surf. Sci. 76/77, 322 (1994).
6. J. A. Floro, E. Chason, R. D. Twesten, R. Q. Hwang, and L. B. Freund, Phys. Rev. Lett. 79, 3946 (1997).
7. R. M. Tromp, F. M. Ross, and M. C. Reuter, Phys. Rev. Lett. 84, 4641 (2000).
8. P. Sutter and M. G. Lagally, Phys. Rev. Lett. 84, 4637 (2000).
9. A. G. Cullis, D. J. Robbins, A. J. Pidduck, and P. W. Smith, J. Cryst. Growth 123, 333 (1992).
10. J. A. Floro, E. Chason, L. B. Freund, R. D. Twesten, R. Q. Hwang, and G. A. Lucadamo, Phys. Rev. B 59, 1990 (1999).
11. J. Tersoff and F. K. LeGoues, Phys. Rev. Lett. 72, 3570 (1994).
12. D. E. Jesson, K. M. Chen, S. J. Pennycook, T. Thundat, and R. J. Warmack, Phys. Rev. Lett. 77, 1330 (1996).
13. N. S. Chokshi and J. Mirecki-Millunchick, Appl. Phys. Lett. 76, 2382 (2000).
14. J. W.P. Hsu, E. A. Fitzgerald, Y. H. Xie, P. J. Silverman, and M. J. Cardillo, Appl. Phys. Lett. 61, 1293 (1992).
15. X. Deng and M. Krishnamurthy, Phys. Rev. Lett. 81, 1473 (1998).
16. K. M. Chen, D. E. Jesson, S. J. Pennycook, T. Thundat, and R. J. Warmack, Appl. Phys. Lett. 66, 34 (1995).
17. C. H. Lam, C-.K Lee, and L. M. Sander, Phys. Rev. Lett. 89, 216102 (2002).
18. J. L. Gray, R. Hull, and J. A. Floro, Appl. Phys. Lett. 81, 2445 (2002).
19. J. Tersoff and R. M. Tromp, Phys. Rev. Lett. 70, 2782 (1993).
20. D. E. Jesson, G. Chen, K. M. Chen, and S. J. Pennycook, Phys. Rev. Lett. 80, 5156 (1998).
21. M. Kästner and B. Voigtländer, Phys. Rev. Lett. 82, 2745 (1999).
22. J. L. Gray, N. Singh, D. M. Elzey, R. Hull, and J. A. Flora, Phys. Rev. Lett. (in press).
23. J. Tersoff, B. J. Spencer, A. Rastelli, and H. von Känel, Phys. Rev. Lett. 89, 196104 (2002).