Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 2, 2009, Pages

  Myers, David R ^a   Cheng, Kan Bun ^a   Jamshidi, Babak ^a   Azevedo, Robert G ^a   Senesky, Debbie G ^a   Chen, Li ^b   Mehregany, Mehran ^b   Wijesundara, Muthu B J ^a,c   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Case Western Reserve University   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Double ended tuning fork (DETF); Harsh environment; High shock; High temperature; Inertial; Microelectromechanical systems (MEMS); Sensors; Silicon carbide (SiC); Strain; Thermal effects

Indexed keywords

ACCELEROMETERS; BANDWIDTH; COMPOSITE MICROMECHANICS; GAGES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS; SHOCK TESTING; SILICON CARBIDE; TRANSDUCERS;

DOUBLE-ENDED TUNING FORKS; HARSH ENVIRONMENT; HIGH SHOCK; HIGH TEMPERATURE; INERTIAL; MICROELECTROMECHANICAL SYSTEMS (MEMS);

TUNING;

EID: 77952759926     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3143192     Document Type: Article

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