Dual-mode temperature compensation for a comb-driven MEMS resonant strain gauge

Sensors and Actuators, A: Physical

Volumn 144, Issue 2, 2008, Pages 374-380

  Azevedo, Robert G ^a   Huang, Wayne ^a   O'Reilly, Oliver M ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Gage; Gauge; MEMS; Sensor; Strain; Temperature compensation

Indexed keywords

RESONANCE; SENSORS; STRAIN; VIBRATION ANALYSIS;

STRAIN SENSITIVITY; TEMPERATURE COMPENSATION;

MEMS;

EID: 43549115899     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.02.007     Document Type: Article

References (20)

1. Seshia A.A., Palaniapan M., Roessig T.A., and Howe R.T. A vacuum packaged surface micromachined resonant accelerometer. JMEMS 11 6 (2002) 784-793
2. Su S.X.P., Yang H.S., and Agogino A.M. A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology. IEEE Sens. J. 5 6 (2005) 1214-1223
3. Bernstein J., Cho S., King A.T., Kourepenis A., Maciel P., and Weinberg M. A micromachined comb-drive tuning fork rate gyroscope. Proceedings of IEEE Micro Electro Mechanical Systems (1993) 143-148
4. Beeby S.P., Ensell G., Baker B.R., Tudor M.J., and White N.M. Micromachined silicon resonant strain gauges fabricated using SOI wafer technology. JMEMS 9 1 (2000) 104-111
5. Wojciechowski K.E., Boser B.E., and Pisano A.P. A MEMS resonant strain sensor operated in air. MEMS'04 (2004) 841-845
6. J.R. Vig, R.L. Filler, Method for measuring mass change using a quartz microbalance, U.S. Patent 5,869,763, February 9, 1999.
7. Vig J.R. Temperature-insensitive dual-mode resonant sensors-a review. IEEE Sens. J. 1 (2001) 62-68
8. Kusters J.A., Fischer M.C., and Leach J.G. Dual mode operation of temperature and stress compensated crystals. Proceedings of 32nd Annual Frequency Control Symposium (1978) 389-397
9. Schodowski S.S. Resonator self-temperature-sensing using a dual-harmonic-mode crystal oscillator. 43rd Annual Symposium on Frequency Control (1989) 2-7
10. Wang Z., Zhu H., Dong Y., and Feng G. A thickness-shear quartz resonator force sensor with dual-mode temperature compensation. IEEE Sens. J. 3 4 (2003) 490-496
11. Kosykh A.V., Abramson I.V., and Bagaev V.P. Dual-mode crystal oscillators with resonators excited on b and c modes. IEEE International Frequency Control Symposium (1994) 578-586
12. Watanabe Y., Sekimoto H., Goka S., and Niimi I. A dual mode oscillator based on narrow-band crystal oscillators with resonator filters. IEEE International Frequency Control Symposium (1997) 932-937
13. Rubach R. Dual mode digitally temperature compensated crystal oscillator. 36th Annual Frequency Control Symposium (1982) 571-575
14. Quevy E.P., and Howe R.T. MEMS resonators for precise reference oscillators. Radio Frequency Integrated Circuits Symposium (2005) 113-116
15. Hsu W.-T., Clark J.R., and Nguyen C.T.-C. Mechanically temperature-compensated flexural-mode micromechanical resonators. IEEE International Electron Devices Meeting (2000) 399-402
16. Tilmans H.A.C., Bouwstra S., Ijntema D.J., Elwenspoek M., and Klein C.F. A differential resonator design using a bossed structure for applications in mechanical sensors. Sens. Actuators A25-A27 (1991) 385-393
17. Hopcraft M., Melamud R., Candler R.N., Parl W.-T., Kim B., Yama G., Partridge A., and Kenny T.W. Active temperature compensation for micromachined resonators. Proceedings of Solid-State Sensor, Acutator and Microsystems Workshop (2004) 364-367
18. Jeong J.-H., Chung S.-H., Lee S.-H., and Kwon D. Evaluation of elastic properties and temperature effects in Si thin films using an electrostatic microresonator. JMEMS 12 4 (2003) 524-530
19. Tang W.C., Lim M.G., and Howe R.T. Electrostatic comb drive levitation and control method. JMEMS 1 4 (1992) 170-178
20. Kawashima H., Sunaga K., and Yamagata S. Torsional vibration of quartz crystal beams with static axial loads and its application to sensors. 1997 IEEE International Frequency Control Symposium (1997) 183-188