A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 2-8

  Chen, Li ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

Capacitive; Engine pressure; Harsh environment; High temperature; In cylinder pressure; Poly SiC; Pressure sensor; Silicon carbide

Indexed keywords

CAPACITANCE; COMBUSTION; COMBUSTION CHAMBERS; COMBUSTION EQUIPMENT; CYLINDERS (SHAPES); ELECTRONICS INDUSTRY; ENGINE CYLINDERS; INTEGRATED CIRCUITS; INTERNAL COMBUSTION ENGINES; MEASUREMENTS; MECHANICS; MICROANALYSIS; MICROELECTRONICS; MICROMACHINING; MONITORING; NONMETALS; PRESSURE; PRESSURE MEASUREMENT; PRESSURE SENSORS; RESEARCH; SENSORS; SILICON; SILICON CARBIDE; SMOKE; SOFTWARE PROTOTYPING; THERMOCHEMISTRY;

(1 1 0) SURFACE; (100) SILICON; (P ,P ,T) MEASUREMENTS; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSORS; CERAMIC PACKAGING; CYLINDER HEADS; CYLINDER PRESSURES; ELSEVIER (CO); ENGINE PRESSURE; HIGH TEMPERATURE (HT); IN-CYLINDER PRESSURE; INSTRUMENTATION AMPLIFIERS; INTERNAL COMBUSTION; MASS PRODUCIBLE; MATE RIAL PROPERTIES; OPERATING TEMPERATURES; RESEARCH PROTOTYPE; SENSOR ELEMENTS; SIC SUBSTRATES; SILICON CARBIDE (SIC); STABLE OPERATIONS; STATIC PRESSURES;

DETECTORS;

EID: 44849138904     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.015     Document Type: Article

References (7)

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