Nanoscale patterning of organic monolayers by catalytic stamp lithography: Scope and limitations

ACS Applied Materials and Interfaces

Volumn 1, Issue 12, 2009, Pages 2711-2720

  Mizuno, Hidenori ^a   Buriak, Jillian M ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

hydrosilylation; nanoscale patterning; organic monolayer; PDMS stamp; silicon surface block copolymer; soft lithography

Indexed keywords

NANOSCALE PATTERNING; ORGANIC MONOLAYER; PDMS STAMP; SILICON SURFACE BLOCK COPOLYMER; SOFT LITHOGRAPHY;

ACETYLENE; ALDEHYDES; BLOCK COPOLYMERS; COPOLYMERIZATION; ELECTRON DEVICE MANUFACTURE; ELECTRON ENERGY LEVELS; HYDROSILYLATION; MICROCHANNELS; MONOLAYERS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; OLEFINS; PLATINUM; SILICON; SILICON COMPOUNDS; SILICON OXIDES;

LITHOGRAPHY;

EID: 77951616061     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am900602m     Document Type: Article

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