Technology interdependence and the evolution of semiconductor lithography

Solid State Technology

Volumn 50, Issue 11, 2007, Pages 51-54

  Kapoor, Rahul ^a   Adner, Ron ^a  

^a INSEAD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ECOSYSTEMS; EMULSIONS; IMAGE ANALYSIS; LITHOGRAPHY; TECHNOLOGY TRANSFER;

CONTACT PRINTING; DEFECT RATES; PROJECTION SCANNERS; SEMICONDUCTOR LITHOGRAPHY;

SEMICONDUCTOR DEVICES;

EID: 36749008596     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (4)

1. G.E. Moore, "Lithography and the Future of Moore's Law," Proc. of the International Society for Optical Engineering, Vol. 2438, pp. 2-17, 1995.
2. R. Adner, "Match Your Innovation Strategy to Your Innovation Ecosystem," Harvard Business Review, Vol. 84, No. 4, pp. 98-107, 2006.
3. R. Adner, R. Kapoor, "Innovation Ecosystems and Innovator Outcomes: Evidence from the Semiconductor Lithography Equipment Industry: 1962-2004." INSEAD Working Paper, 2006.
4. K. Derbyshire, "Issues in Advanced Lithography," Solid State Technology, Vol. 40, No. 5, p. 16, 1997.