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Journal of Applied Physics

Volumn 107, Issue 7, 2010, Pages

Photoemission study of the SiO2 conversion mechanism to magnesium silicate

(2) Casey, Patrick a Hughes, Greg a

a DUBLIN CITY UNIVERSITY (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION MECHANISM; INTERFACE CHARACTERISTIC; INTERFACE CHEMISTRY; K DIELECTRICS; MAGNESIUM SILICATES; MAGNESIUM SILICIDES; NATIVE OXIDES; SILICATE FORMATION; SILICON NATIVE OXIDES; THERMAL STABILITY; TRANSITION REGIONS;

DESORPTION; MAGNESIUM; SEMICONDUCTOR DEVICE MANUFACTURE; SILICATES; SILICIDES; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS;

SILICON OXIDES;

EID: 77951568899 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3357392 Document Type: Article

Times cited : (13)

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